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For almost 50 years, silicon sensors and actuators have been on the market. Early devices were simple sand-alone sensors and some had wide commercial success. There have been many examples of success stories for simple silicon sensors, such as the Hall plate and photo-diode. The development of micromachining techniques brought pressure sensors and accelerometers into the market and later the gyroscope...
Today, as global environmental regulations are being tightened, both IC and package technologies are also becoming far more complicated. More Moore and more than Moore, which manifest themselves in system-on-chip (SoC) and system-in-a-package (SiP), respectively, are being used more in combination to meet the ever-more-stringent cost and time-to-market requirements of consumer products with more functions...
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