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This paper presents a highly efficient sensitivity-based method for capacitance extraction, which models both systematic and random geometric variations. This method is applicable for BEM-based Layout Parasitic Extraction (LPE) tools. It is shown that, with only one system solve, the nominal parasitic capacitances as well as its relative standard deviations caused by both systematic and random geometric...
Recent CAD methodologies of design-for-manufacturability (DFM) have naturally led to a significant increase in the number of process and layout parameters that have to be taken into account in design-rule checking. Methodological consistency requires that a similar number of parameters be taken into account during layout parasitic extraction. Because of the inherent variability of these parameters,...
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