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There are increasing new needs for advanced process control (APC) from chemical mechanical polishing (CMP) process along with the technology nodes advancing to 28nm and below. Besides traditional applications for wafer to wafer and batch to batch thickness variation reduction, and feed-forward based on incoming thickness/depth, the other new needs include within wafer uniformity control based on consumable...
According to geological and development characteristic of the Bei 301 block Hailar oil field, the petrel software build a three dimension fine geologic model, then use the eclipse software in water flooding historical to fit and to study the remaining oil distribution condition. On this basis, the numerical simulation method was used to study the field tests, the timing, profile radius heterogeneity...
Currently positioning is still a big challenge in an underground project. Amberg Technologies offers a surveying solution that sets new benchmarks in measurement and automation for conventional tunnelling. The actual surveying solution uses total station and laser scanning technologies. Underground projects have some special characteristics compared to civil engineering construction sites. Especially...
Profile control of cold rolling strip include items such as crown, flatness and edge drop, it is a key issue in the strip rolling industry. The dynamic shape control of strip is important in the process of tandem cold rolling, it is usually coupled with the gauge control of strip. In this paper, a set of coupling models, such as crown and flatness coupling model, shape and gauge coupling model, are...
With the scaling down of integrated circuit devices, a constant effort is needed to improve the patterning technologies of interconnect stacks using either the metallic masking strategy or the organic masking strategy. Critical dimensions and profile control, plasma-induced damages (modifications, post etch residues, porous SiOCH roughening) are the key challenges to successfully pattern dual damascene...
Aiming at the drawbacks of numerical simulation in the effect prediction of profile control, and by using the support vector machine method, this paper studies and predicts the 32 wells samples of DONGXIN block, on which the profile control is carried out. And in a reasonable range, the sample’s density of some factors is locally refined and the critical value of the factor is discussed. It is indicated...
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