Search results
IEEE Transactions on Instrumentation and Measurement > 2011 > 60 > 4 > 1132 - 1140
2010 2nd International Conference on Mechanical and Electronics Engineering > 1 > V1-154 - V1-158
Journal of Microelectromechanical Systems > 2010 > 19 > 5 > 1197 - 1206
IEEE Transactions on Semiconductor Manufacturing > 2010 > 23 > 1 > 39 - 52
Journal of Microelectromechanical Systems > 2009 > 18 > 6 > 1382 - 1395
IEEE Journal of Selected Topics in Quantum Electronics > 2007 > 13 > 2 > 147 - 154
2006 SICE-ICASE International Joint Conference > 2179 - 2183
2006 SICE-ICASE International Joint Conference > 2168 - 2173