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This paper presents new investigations to improve dynamic behavior of electrostatic cantilever based MEMS sensors by reducing pull-in voltage nonlinearity. It is believe that pull-in voltage is one of the major factors to generate pull-in force that induces parasitic pull-in frequency as a result the behavior of MEMS sensor become nonlinear. The dynamic behavior of the device is modeled under the...
The following topics are dealt with: emerging nano-circuits and systems; analog A/D converters; embedded electronics; computer arithmetic and clock circuits; biomedical and bio-inspired engineering systems; deep submicron design and automation; memory design and techniques for managing process parameter variations; RF, microwave and optical systems; amplifiers; low-power design and design automation;...
The following topics are dealt with: planar SOI devices; SOI memories; SOI photonics, MEMS, sensors and circuits; materials and 3D technologies; multi-gate SOI devices; SOI radiation effects and RF applications; device characterization, reliability, and modeling.
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