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We report a high effective work function (Phim-eff) and a very low Vt Ir gate on HfLaO p-MOSFETs using novel self-aligned low-temperature shallow junctions. This gate-first process has shallow junctions of 9.6 or 20 nm that are formed by solid phase diffusion using SiO2-covered Ga or Ni/Ga. At 1.2-nm effective oxide thickness, good Phim-eff of 5.3 eV, low Vt of +0.05 V, high mobility of 90 cm2/V-s...
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