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This paper presents the design and modeling of the MEMS mechanical fatigue in the presence of stress raising notches. FEM models are realized to study the effect of notch geometric parameters on the stress concentration factor of the gold specimen subjected to tensile loading. Test structures with three different specimens, i.e. without notch, with single notch and with a double notch are modeled...
In this paper, the reliability of gold components for microelectromechanical systems applications is studied by evaluating the mechanical fatigue behavior. The lifetime of microspecimens under alternate loads with different mean stress conditions is tested with the introduction of an original experimental procedure. Dedicated fatigue test devices are designed and fabricated with the aim of producing...
The mechanical fatigue behavior of gold microbeams is analyzed. Dedicated devices have been designed and built able to produce alternate loading on gold specimens; the electrostatic actuation is used as driving force. Gold beams are tested under both bending and tensile alternate loadings. Results were used to plot S-N curves and fatigue Goodman-Smith diagram in order to estimate the fatigue limit...
The effect of mechanical fatigue on structural performances of gold devices is investigated. The pull-in voltage of special testing micro-systems is monitored during the cyclical load application. The mechanical collapse is identified as a dramatic loss of mechanical strength of the specimen. The fatigue limit is estimated through the stair-case method by means of the pull-in voltage detections. Measurements...
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