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Plasma spectroscopic techniques can provide a quick, on-site solution for monitoring the potability of water sources. This paper reports on a new, essentially disposable ceramic microdevice that utilizes on-chip doped DC plasmas to spectroscopically analyze the atomic and molecular composition of water samples on-site. The device is fabricated on an alumina ceramic substrate, which is ideal due to...
A surface micromachining technique is proposed which significantly reduces the undesirable pattern following effect and prevents disturbance in subsequent layers of the structure. This modified lift off method starting from a flat surface embeds the base layer of microstructure in the substrate in order to maintain initial surface profile, and thus allows fabrication of subsequent layers to start...
A Monte-Carlo simulation code SEALER was developed for neutron-induced single event upset of semiconductor devices at the ground level, in which composite material effects are fully simulated. Any size and structures of 8 composite material such as Si, SiO2, Si3N4, Ta2O5, WSi2, Cu, Al, TiN can be included for analyses of nuclear spallation reactions and charge collection mechanisms. Some preliminary...
A hot wall-based low temperature annealing system using resistively heated, stacked hot plates was designed and tested for low temperature (100~500degC) annealing applications for 200 mm and 300 mm wafers. The system is designed to process five wafers simultaneously for productivity enhancement purposes. Thermal properties of the system and wafer temperature profiles during low temperature annealing...
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