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Journal of Microelectromechanical Systems > 2014 > 23 > 2 > 347 - 355
Journal of Microelectromechanical Systems > 2011 > 20 > 2 > 436 - 440
Journal of Microelectromechanical Systems > 2014 > 23 > 2 > 347 - 355
Journal of Microelectromechanical Systems > 2011 > 20 > 2 > 436 - 440