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In this paper, the gated imaging technique of dynamic photon emission is realized and introduced as a powerful localization tool by using a low-cost near-infrared InGaAs image intensifier (I.I). At first, the setup and the method for gated imaging of photon emission microscope (GI-PEM) are presented. As one of global localization tools, it shows an unique and economical debugging and pinpointing capabilities...
In this paper, we present three cases studies with dedicated FIB-TEM technique that developed to characterize each of them. The first case describes a FIB sample preparation method that can include two columns of the structure of interest into one sample. It is a useful technique to characterize the overlay offset when more than one column of the structures is concerned. The second case is about to...
To realize higher spatial resolution than conventional SEM-based nano-probing system, a novel Electron Beam Absorbed Current imaging system was newly developed using a Hitachi HD-2700 200 kV dedicated STEM. Its specimen holder accommodates a mechanical probe for current detection and TEM grid specimen. This holder also has a micrometer-based coarse positioning and piezoelectric-elements-based fine...
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