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Failure analysis is very important in semiconductor business not only for customer satisfaction but also for process improvement and new product development. A successful failure analysis depends mainly on accurate failure verification, appropriate fault isolation techniques, and precise physical analysis steps implemented on the specimen. However, the trend in package development of current ICs makes...
Failure mode is behavior of a component after failure. The confirmation of failure mode is the first and the most important step in a failure analysis. Many symptoms may appear when a component fails, but which are substantial and can be defined as failure modes should be made clear, for failure mode is the direction of a failure analysis and is the key factory of its success, an inaccurate failure...
Corrosion on wafer level aluminium-copper (Al-Cu) interconnects and electroless nickel-palladium (Ni-Pd) pads were characterized using inline metrology and physical failure analysis methods. Chemical methods were then used to study the mechanism of the defects. Al-Cu localized corrosion occurred as Al-oxides growth with the presence of fluorine (F) and chlorine (Cl) due to moisture stain. Using chemical...
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