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The clamped inductive turn-off failure of Silicon-on-Insulator Lateral Insulated Gate Bipolar Transistor (SOI-LIGBT) with multi-finger layout pattern is investigated in this paper. Firstly, the measurements of device failure under clamped inductive turn-off are discussed. Secondly, simulations are carried out to reproduce the failure by using Sentaurus TCAD. It is found that the failure origins from...
Electro optical techniques including EOFM (Electro Optical Frequency Mapping) and EOP (Electro Optical Probe) are common dynamic optical probing techniques used during failure analysis. This paper demonstrated two real cases to show the application of these techniques on the fault isolation of high resistive vias.
A theory has been developed for geometric variation of trigate FinFETs. This geometric variation includes both line roughness induced variation and oxide-thickness variation, which can be measured from gate capacitance and Ig current variations, respectively. Experimental results show that trigate devices are subject to serious line variations as the fin height scales up and the fin-width scales down,...
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