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Fabrication of MEMS based multi-functional devices demands complex integration of several micro-engineered components to perfection. It is therefore critical to ensure that at every stage of fabrication the contaminants or particles that get deposited on the device parts do not have any deleterious effect on the device performance. As most of the MEMS based devices are fabricated in a clean room environment...
A MEMS capacitive microphone with high mechanical sensitivity is presented. The microphone has a diaphragm thickness of 1 μm, 0.5 × 0.5 mm2 dimension, and an air gap of 1.0 μm. Using the results from analysis and simulation, important features of MEMS capacitive microphone such as pull-in voltage, sensitivity and resonance frequency are respectively obtained as 3.8v, −43dbv/Pa, and 74 kHz. A model...
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