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We fabricated a piezoelectric MEMS energy harvester (EH) of Pb(Zr, Ti)O3 (PZT) thin film on stainless steel cantilever. The use of metal substrates makes it possible to fabricate thin cantilevers owing to a large fracture toughness compared with Si substrates. The PZT thin film was directly deposited onto 50-μm-thick stainless steel substrate by rf-magnetron sputtering. By attaching a tip mass (weight:...
This paper describes a photovoltaic system using a tapped transformer for energy harvesting. The photovoltaic system converts energy from the sunlight into electric DC power by solar modules, and the DC power into AC power by a pulse width modulation inverter. The AC power is fed to the grid through the tapped transformer which changes the amplitude of the AC voltage. By changing the tap, the boosting...
We have developed a three-dimensional (3-D) molding process for the production of piezoelectric ceramic elements by using a master polymer mold produced by microstereolithography. In this method, ceramic slurry is injected into a 3-D polymeric mold via a centrifugal casting process. The polymeric master mold is thermally decomposed so that complex 3-D piezoelectric ceramic elements can be produced...
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