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In present days in-depth behaviour characterization of multifunctional deposited films for MEMS/BIO-MEMS applications, showed the need of adequate properties, in order to assure the demanded designed functions for envisaged applications, such as: physical, chemical, mechanical, tribological and biocompatible. The development of new materials for films deposition with high potential to be used in BIO-MEMS...
Some p-type and n-type ZITO transparent and conductive films of 300 nm thickness, have been deposited by vacuum thermal evaporation and oxidation in air on different substrates. The electrical and optical properties of the thin films have been studied as a function of chemical composition, substrate nature and annealing conditions. X-ray diffraction and scanning electron microscopy were used in order...
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