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This paper reports the initial investigation on a novel acoustic sensor design based on micro fluidic technology. The report includes the proposed design structure and the simulation of key structure materials that affect the performance of such sensor. Simulation works included the analysis of acoustic response of the membrane and the damping effect when the cavity gap is filled with liquid or electrolyte...
The fabrication and characterization of static microfluidic transistors on <100> p-silicon is demonstrated. A three photo mask level fabrication process, allows the construction of the microfluidic transistor with multiple channel widths which are 50μm, 100μm and 500μm. The basic device consists of two reservoirs connected via a channel which forms the basic fluidic circuit. Two doped regions...
We have developed a technique of fabricating device channels for microfludics system by using high performance epoxy polymeric based dry film resists (DFRs). We will use the fabrication method originated in silicon microelectronics fabrication industry. This is because the interest in this industry has made the current microfluidic devices fabricated not only from silicon substrate but also to a range...
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