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The fabrication and characterization of static microfluidic transistors on <100> p-silicon is demonstrated. A three photo mask level fabrication process, allows the construction of the microfluidic transistor with multiple channel widths which are 50μm, 100μm and 500μm. The basic device consists of two reservoirs connected via a channel which forms the basic fluidic circuit. Two doped regions...
This paper presents the feasibility challenges of designing dc-dc buck and boost converter in nano-scale. With the gradual development of VLSI design platforms, new issues have been introduced and presented to the power electronics circuit experts and VLSI engineers. Today's VLSI industry has reached the technology well within the nano-meter range. The consequence of implementing the basic power electronics...
This paper presents a comparison of thin film materials used as movable membrane for thermal actuated micropump. The materials discussed are PMMA, polyimide, silicon nitride (Si3N4) and single crystal silicon. The properties of membrane material are characterized using Finite Element Analysis (FEA) to study its mechanical and physical behavior that are suitable to be used as an actuator for thermal...
Semiconductor fabrication is known to be the one of the most complex manufacturing operations. This is due to total processing steps in semiconductor fabrication is as high as 1000 steps and the process will re-enter through same equipments multiple times. This will always pose a challenge to the operational team to achieve goal for optimal cycle time and maximum output. One of the WIP (Work In Progress)...
We have developed a technique of fabricating device channels for microfludics system by using high performance epoxy polymeric based dry film resists (DFRs). We will use the fabrication method originated in silicon microelectronics fabrication industry. This is because the interest in this industry has made the current microfluidic devices fabricated not only from silicon substrate but also to a range...
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