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This paper introduces MEMS filters based on the use of traveling flexural waves. The underlying concept of these devices draws on an analogy with SAW devices, while replacing the surface elastic wave with a flexural wave on a suspended beam. This is in contrast with traditional flexural MEMS devices whereby all signal processing is done via a resonating element corresponding to a standing flexural...
The present paper describes a novel approach to evaluate the mass sensitivity of a Love wave (LW) sensor. A ZnO/XY LiNbO3 delay line based device with a sensing film was modeled and simulated applying the 3D- Finite Element Method (FEM). The radio frequency signal delays due to the thickness changes induced to the sensing film were registered and measured at the output Interdigital Transducer (IDT)...
A high temperature stable packaging for surface acoustic wave devices for application of radio frequency transponders in harsh environment was investigated. Several ceramic adhesives were tested and characterized for die bonding. The expected thermal stresses were calculated via finite elemente method. The adhesive forces were measured via shear tests after thermal aging of test samples up to temperatures...
Wireless SAW RFID sensors offer several advantages over similar silicon technology that include passive operation, radiation hardness, and the ability to operate in extreme temperatures. Due to these unique material and device properties, NASA has shown considerable interest in passive, wireless SAW sensors for ground and space flight operations. Several embodiments of SAW sensors have been well established...
Lateral field excitation (LFE) acoustic wave devices, which employ two electrodes on the same surface of a piezoelectric substrate, have been found attractive in sensing applications. However, up to now, the cut for the pure-LFE mode of LiTaO3 is still unknown, which has hindered the application of LiTaO3 pure-LFE mode device in liquid phase sensing. In this work, pure-LFE on LiTaO3 was investigated...
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