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In this paper, we investigate the impact of packaging on the behavior of MEMS convective accelerometers. The objective is to identify the influence of package dimensions on system performances to develop in a close future a compact model that integrates those influences. Experiments are based on FEM simulations and results are discussed with respect to the package height, the package shape and the...
Hyperthermia affects certain regulatory proteins, kinases or cyclins, resulting in alternations to the cell cycle and even to apoptosis. Damage to the cell plasma membrane is a key factor in the killing of a cell by hyperthermia. Analysis at the single-cell level is necessary for understanding the fundamental mechanisms of hyperthermia-induced cell death and the generation of thermotolerance in surviving...
We present a dual axis accelerometer made with a frontside bulk micromachining on a 0.35 μm CMOS. The accelerometer is based on thermal convection where a central heater creates a hot gas bubble. Acceleration applied to the body will change the temperature distribution on the device, the latter being measured by four detectors containing six serially connected thermocouples. The paper will present...
Due to the development of high power density and high heat flux of MEMS, IC and LED components and devices, the thermal management of microelectronics has become a very critical issue in Microsystems and optoelectronic industries. This has lead to the requirement of high thermal performance materials. To enhance the thermal performance of current thermal modules, it is very important to develop advanced...
Due to the miniaturization seen in the last decades, several macro models that neglect parameters have to be revised in order to evaluate the behavior of different types of microsystems. In this paper we present the analysis of one such parameter which affects the thermal functionality, namely, the convection of natural gases. In macro scale this parameter is usually neglected, because the conductivity...
Hot embossing and injection moulding belong to the established plastic moulding processes in microengineering. Based on experimental and theoretical findings, a variety of microstructures have been replicated using these processes. However, beside the technology also the moulding materials their physical and chemical properties determines the process and their parameters. Especially high temperature...
For mass production of multiscale-optical components, micro- and nanostructured moulding tools are needed. Metal tools are used for hot embossing or injection moulding of microcomponents in plastics. Tools are typically produced by classical forming processes such as mechanical manufacturing e.g. turning or milling, laser manufacturing or electrical discharge machining (EDM). Microstructures with...
This paper will present results of an improved process based on a new replication machine. Temperature stability and pressure distribution is highly improved, even at reduced cycle times. With an upgraded temperature range microthermoforming of high temperature polymers is possible. This technology is well suited for the replication of three-dimensional micro parts with multiscale features.
To fulfill the increasing small size, light weight, and low price demand of the optoelectronic products, the size and thickness of each component have to be reduced resultantly. Since a thinner liquid crystal display (LCD) panel can effectively reduce the thickness of an optoelectronic product, the thickness of a LCD panel is usually thinned out by polishing. Polishing is likely to produce an uneven...
Thermal properties of human beings have been measured in this work and used for design optimization of wearable thermoelectric energy harvesters. The theory of wearable thermoelectric generator is applied for designing miniature thermopiles that could be batch-fabricated in a microelectronic-like or a MEMS process. It is shown that low-cost film-based thermopiles with satisfactory performance characteristics...
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