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The following topics are dealt with: MEMS/MOEMS; numerical simulation and modelling; reliability and testing; RF MEMS; sensors; compact and behavioral modelling; actuators; CAD; microfabrication, integration and packaging; embossing and mould; large area manufacturing; value and packaging; assembly and packaging; control and read-out architectures for MEMS and NEMS.
For mass production of multiscale-optical components, micro- and nanostructured moulding tools are needed. Metal tools are used for hot embossing or injection moulding of microcomponents in plastics. Tools are typically produced by classical forming processes such as mechanical manufacturing e.g. turning or milling, laser manufacturing or electrical discharge machining (EDM). Microstructures with...
This paper will present results of an improved process based on a new replication machine. Temperature stability and pressure distribution is highly improved, even at reduced cycle times. With an upgraded temperature range microthermoforming of high temperature polymers is possible. This technology is well suited for the replication of three-dimensional micro parts with multiscale features.
A method to fabricate a low cost, large area and flexible mould and its applications in large area roller embossing are presented in this paper. A liquid crystal polymer (LCP) film, which had a glass transition temperature as high as 280°C and was clad with a copper foil on each side, was used as a starting material for mould fabrication. The LCP film and the copper foil were 50 μm and 36 μm thick,...
In this paper we present a new roll-to-roll embossing process allowing the replication of micro patterns with feature sizes down to 0.5 μm. The embossing process is suitable for the continuous output of micro patterned structures and is not accompanied by waste produced during the initial hot embossing phase. This is due to the fact that the foil is not moved during the time needed to reach a thermal...
Hot embossing enables accurate replication of polymer structures in a broad variety of polymers even in the range of micro- and nanometer. Comparatively long cycle times and high insert costs however limit the further distribution of hot embossed parts. The use of hot embossed polymer inserts for subsequent replication can improve the through-put of replicated parts and reduces the costs for fabricating...
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