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In this paper, we investigate the impact of packaging on the behavior of MEMS convective accelerometers. The objective is to identify the influence of package dimensions on system performances to develop in a close future a compact model that integrates those influences. Experiments are based on FEM simulations and results are discussed with respect to the package height, the package shape and the...
In the design process of micro systems their heterogeneity is one major issue. This heterogeneity is caused by a close coupling of different physical effects as well as a strong influence of manufacturing technologies and operation conditions on the system behavior. System level simulation of micro systems features outstanding potentials for a comprehensive design support covering the whole range...
We present simple and original techniques well suited for designing efficient control strategies of any type, for a generic class of MEMS. These techniques are particularly well adapted when high performances and precision are required, because they are intensively based on the predictive capabilities of the model without needing its resolution, which make the so-obtained controls both simple to implement...
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