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The bandwidth of fast steering mirror (FSM) is about several tens of hertz which is related to Tylar frequency of atmospheric turbulence, and the bandwidth of deformable mirror ranges from several tens to hundreds hertz relates to Greenwood frequency of atmospheric turbulence. According to practical experience, the ratio of fast steering mirror and deformable mirror should be from one is to five to...
The design, simulation, and fabrication results for a first generation polymer CMUT are presented. Baseline ANSYS and MATLAB simulations show that the use of a silicon nitride membrane should increase the transmission signal by 28% and the receiver sensitivity by 33%, when compared to a conventional poly silicon membrane. Simulations with a polymer membrane showed a maximum membrane deflection increase...
This paper presents the design, simulation, fabrication and preliminary test results of a monolithic triaxial micromachined vibratory gyroscope. The device is a monolithic integration of two uniaxial in-plane (x- and y-axis) gyroscopes and one uniaxial out-of-plane (z-axis) gyroscope and the three individual gyroscopes are all actuated by electrostatic force and detected by capacitors. In order to...
Canceling and minimizing quadrature error is the key to improve the performance of MEMS gyroscopes. This paper addresses how to design suspension springs to decrease the quadrature error which induced with manufacture asymmetric. According to the stiffness matrix of suspension spring, the relationship among quadrature error, terms of stiffness matrix and width mismatch was put forward. The off-diagonal...
Giant magnetoelectric coupling effect between Ni and PZT was discovered by investigating the Ni/PZT laminate composites experimentally and numerically. The experimental results, which were well coincident with the data calculated by the finite element software ANSYS, showed that the magnetoelectric voltage coefficient alphaE could reach to 4800 mV/A for Ni/PZT bilayer cantilever at its resonant frequency...
An improved XY positioning stage having a coplanar structure design, which makes the guide planes in X- and Y-directions are of the same height. As a result, the Abbe's error and the cumulative error can be reduced. Symmetric structure, linear slide ways and low thermal expansion material are all considered to achieve low structure distortion and thermal shift with impacted force and temperature change...
This paper reports a bulk Si micromachined distributed digital microwave phase shifter with butterfly-like loading microbridges. Having a multilayer structure, the bridges use heavily boron-doped single crystal silicon (SCS) as the skeleton layer, so that the excellent mechanical property of SCS can be utilized to ensure the performance and reliability of the device. The fabrication is shown to be...
Microelectromechanical system (MEMS) is naturally continuing its downsizing into nanoelectromechanical system (NEMS), but at the same time it is indispensable in the package equipment used for nano-devices packaging in NEMS manufacture. A novel dual-grating macro-micro driven high speed precision XY-stage positioning system is presented in this paper. Combining macro with micro actuator, a system...
We report the fabrication and characterization of a submicron metallic electrothermal gripper using a combination of electron beam (e-beam) lithography and electroplating techniques. An SU-8 layer was used as a sacrificial layer and polymethyl methacrylate (PMMA) resist was patterned using e-beam lithography to create ~3:1 aspect ratio (1 mum thick, 350 nm critical feature width) mold for electroplating...
In recent years, carbon nanotubes (CNTs) attract intense research duo to their novel mechanical and electronic properties and their tremendous potential for future technological applications. In this paper, a CVD synthesis method of well aligned multi-walled carbon nanotubes using iron(II) phthalocyanine as raw material and catalyst was introduced, then the fabrication of carbon nanotubes thin sheets...
To enable MEMS designers to create fabrication-ready models of MEMS devices in an intuitive environment, this paper describes a MEMS design strategy that uses parameterized three-dimensional (3D) part features to construct geometric models of MEMS devices and then generates mask-layouts and process flows automatically. SolidWorks, an outstanding 3D design tool, is utilized to build the 3D model of...
The carbon nanotube film is grown by low press chemical vapor deposit (LPCVD) method after catalyst grains are introduced with ferro hydroxid sol. The variation of the concentration of catalyst grains versus the surface morphology of carbon nanotube film has been studied. When the distance between two nanotubes is from 200 nm to 500 nm, the threshold electric voltage is around 95 V for the best result...
In order to predict groove shape on laser direct-write polymer microfluidic chip, a three-dimensional transient ablation model has been developed based on heat conduction theory and energy conservation at the erosion surface. The laser is assumed continuous wave Gaussian beam. The finite element surfaces on evaporation side are non-planar and approximated by bilinear polynomial surfaces. An iterative...
A three-dimensional microprobe, which is capable of measuring the forces exerting on the probing pin in all directions, is presented. The microprobe is fabricated on stainless steel and is covered by two sets of piezoelectric transducers. One of the transducers drives the probe, and the other senses the dynamic response to identify the contact between the pin and obstacles. A theoretical model is...
This paper presents an optimized design on surface acoustic wave (SAW)-based pressure sensor, which is composed of a broadband reflective delay line and a bond substrate underneath the diaphragm. Using the equivalent circuit model (ECM), the SAW device was simulated, and the effect of inter-digital transducer structure, acoustic aperture and number of finger pairs on the performance of the system...
Piezoelectric resonators have widely been utilized not only for time keeping devices but also for temperature measurement sensors. In order to obtain a temperature sensor having low power consumption, low cost, fast response, high sensitivity and high precision, resonance frequency of quartz tuning fork crystal for use in temperature sensor was analyzed by the finite element method (FEM). FEM was...
Thrust ripple such as side force, slot force and normal force is key factor which affects the properties of permanent magnet linear synchronous motors (PMLSM). Furthermore, model uncertainties and disturbances greatly affect the PMLSM's motion properties too. Side force was greatly decreased by optimizing the length of the PMLSM mover, and slot force caused by slot effect was greatly reduced by using...
Mach Zehnder type optical modulators with modified ridge structure on a coplanar waveguide traveling wave electrode are investigated by the use of finite element method and BPM CAD waveguide software. The two ends of conventional ridge structure added taped ridge structures is considered, the transmission loss is obviously reduced. It is shown that the device increased modified ridge structure can...
A differential capacitive silicon z-axis micro-accelerometer with special tethers, based on anisotropy etching, anodic bonding and DRIE (deep reactive ion etching) technology is proposed and a novel inertia structure is designed. The device with a three-layer structure can provide a variable sensitivity as changing the thickness of the beam fabricated by one set of masks. The simulation of the static...
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