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Based on piezoelectric ceramics (PZT), a feedback control method for compensating beam drift is proposed in this paper. The actuator can control the pitch and yaw angle of the light simultaneously, and its structure is very simple. The angular drift of laser is detected and separated in the designed optical path. The influence of interference noise is suppressed by moving average filter, and then,...
An innovative parallel error separation technique for on-line measurement and reconstruction of cylindrical profile is presented. A five-probe system configured to target three adjacent cross-sections of the cylinder is proposed to simultaneously execute the three-probe roundness error separation and three-probe straightness error separation. The curved median line is determined by fitting through...
An improved XY positioning stage having a coplanar structure design, which makes the guide planes in X- and Y-directions are of the same height. As a result, the Abbe's error and the cumulative error can be reduced. Symmetric structure, linear slide ways and low thermal expansion material are all considered to achieve low structure distortion and thermal shift with impacted force and temperature change...
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