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This paper presents the optimized design of a novel Focal Plane Array (FPA) structure for opt-mechanical uncooled infrared imaging system. The FPA structure is a bi-material micro-cantilever array which without Si substrate and with thermal isolation organ. In the paper, we build up series of model to describe the structure's IR absorb, heat exchange and thermal-mechanical characters. To optimize...
Gold-coated microcantilevers were used to develop sensitive micromechanical biosensor for detecting mismatch mutations in DNA hybrids. The selective 5'-end immobilization of 25-mer single-stranded (ss) DNA probes to a gold-coated cantilever surface and the specific hybridization of ssDNA targets to the immobilized probe were performed by the direct electric field control. The controlled electric fields...
This paper reports the fabrication technology and testing of polycrystalline diamond (poly-C) mechanical resonators with dimensions as small as 100 nm for the first time. The fabricated structures include cantilever structures patterned using electron beam lithography to have widths of 100 nm, and torsional paddle resonators with a support beam width of 0.5 mum, which sustained a proof mass around...
The reduction in dimensions of biochip arrays is of interest only if the size of the spots containing DNA or proteins is kept uniform. This condition is necessary to properly compare fluorescence signals from the different spots and thus to validate the results. Toward this aim, we propose a fully automated MEMS-based spotter enabling the spatial positioning of the depositing cantilever array and...
Different from the conventional piezoelectric microcantilevers with a piezoelectric film sandwiched between two metal electrodes on cantilever structures, the objective of our investigation is to develop a technology platform based on the integration of two piezoelectric PZT thin-film elements on silicon cantilevers for microsensors and microactuators. Two novel piezoelectric microcantilevers with...
In order to avoid the displacement of the AFM cantilever in surface forces measurement, a force-balanced MEMS sensor is developed. The probe of the sensor is a pendulous micromachined sensing element, which can be considered as a pair of differential capacitors. When the sensor is designed as a closed-loop system, the electrostatic force feedback can balance the surface force supplied on the sensing...
Ultra-sensitive mass sensor is demanded for bio/chemical molecular detection. A piezoresistive resonant cantilever sensor with optimized is developed with an optimized electromagnetic excitation for high-mode flexure resonance. In our experiment, it has been proved that the quality factor of the resonant sensor can be improved by this optimized high-mode resonance exciting technique. Experimental...
This paper presents a monolithic integration of piezoresistive micro-cantilevers with CMOS (complementary metal oxide semiconductor) analog amplifier and digital multiplexer based on the techniques of SOI (silicon on insulator) CMOS and MEMS (micro electronic mechanical system). The three modules, signal detection, signal selection and signal amplification, of the design are proposed step by step...
Microfabricated cantilevers have recently become increasingly popular as transducers in chemical and biological sensors. Here, an evaluation of laboratory prototype that is microcantilever-based optical detection is demonstrated. Surface stress changes when molecules adsorb on cantilevers surface, which offers an attractive way to chemical and biological detection by measuring the bending of cantilevers...
In this paper, flow control of nano fountain pen using active membrane pumping is investigated. DPN (Dip Pen Nano- Lithography) has a shortcoming in which is the need of frequent loading and unloading while coating for broadband patterning. This issue is caused by a limit in quantity of ink, which is tied on the tip surface. The control of fluid injection using active membrane pumping in chambers...
Stress issue in multilayered thin film structures has been investigated in the example of RF MEMS switches. Although a sandwiched thin film structure in theory can offset the stress-induced bending of a cantilever beam, it rarely possible to realize such offset because of the complexity in thin film deposition processes. Computer modeling and experiments have been conducted to reduce the unbalance...
This paper reports the development of a polycrystalline diamond (poly-C) thin film encapsulation packaging process which is integrated into the MEMS cantilever resonator fabrication. The high Young's modulus and chemical stability of poly-C make it an excellent candidate material for a thin film package. A test chip is fabricated using a 4-mask process. First, poly-C cantilever beam resonator is fabricated...
Self-welded double-wall and multi-wall carbon nanotube (DWCNT and MWCNT) bridges were used for the first time as nano-scale piezoresistors to monitor vibration and deformation of silicon cantilever beams. The CNTs were grown using low-pressure metal-catalyzed chemical vapor deposition technique between silicon-on-insulator posts situated over cantilever beams such that when the beams were deformed,...
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