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This paper proposes an optomechanical surface profiler for high aspect ratio vertical walls. The profiler consists of a bulk silicon micro cantilever probe with a vertical mirror at its end and an integrated sheath fiberguide to insert thinned optical fiber, all fabricated by deep reactive ion etching (DRIE). The probe reflects light by integrated vertical mirror and detects the surface contact point...
This paper introduces a picoliter droplet dispenser relying on an array of silicon microcantilevers. The microcantilevers bear fluidic channels, and liquid transfer is achieved by a direct contact of the cantilever tip and the surface. A high degree of control over the location and geometry of the fabricated patterns is ensured by incorporating force sensors and electroassisted deposition means, i...
The reduction in dimensions of biochip arrays is of interest only if the size of the spots containing DNA or proteins is kept uniform. This condition is necessary to properly compare fluorescence signals from the different spots and thus to validate the results. Toward this aim, we propose a fully automated MEMS-based spotter enabling the spatial positioning of the depositing cantilever array and...
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