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Tunable infrared sensors fabricated by surface micromachining with a maximum thermal budget of 2 hours at 125degC have been realized, demonstrating that a generic, robust, environmentally stable MEMS process is possible using maximum process temperatures <200degC
Absorption spectroscopy of CO and CO2 at wavelengths around 1.55mum via an all fiber based remote measurement setup is presented as application where a singlemode MEMS-VCSEL can feature its broadband (51 nm) continuous tuning characteristics
We report on GaSb-based quantum-well diode lasers in a micro-machined external cavity setup using the Littrow-configuration. An electrostatically actuated Si-grating, optimized to achieve a wide tuning range in the 2.3mum wavelength range, is used as a tuning element
We present a new novel design for a 1timesN digital optical space MEMS switch with a large number of output ports. The switch employs a single rotating micromirror. The rotating micromirror consists of a novel electro-static rotary motor, onto which a 3D mirror structure is assembled using a robotic-based microassembly process. The rotating mirror in the switch can digitally rotate with 480 steps...
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