Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 29 - 37
Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 19 - 28
Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 38 - 49
Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 115 - 125
Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 182 - 191
Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 174 - 181
Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 10 - 18
Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 1 - 3
Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 62 - 69
Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 249
Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 50 - 61
Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 7 - 9
Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 4 - 6
Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 155 - 165
Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 216 - 223
Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 100 - 107
Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 192 - 206
Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 241 - 248
Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 207 - 215
Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 108 - 114