Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 241 - 248
Source
Abstract
Identifiers
journal ISSN : | 1057-7157 |
journal e-ISSN : | 1941-0158 |
DOI | 10.1109/JMEMS.2014.2329136 |
Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 241 - 248
journal ISSN : | 1057-7157 |
journal e-ISSN : | 1941-0158 |
DOI | 10.1109/JMEMS.2014.2329136 |