Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 174 - 181
Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 100 - 107
Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 241 - 248
Journal of Microelectromechanical Systems > 2015 > 24 > 2 > 289 - 299
Journal of Microelectromechanical Systems > 2015 > 24 > 2 > 360 - 372
Journal of Microelectromechanical Systems > 2015 > 24 > 2 > 259 - 261
Journal of Microelectromechanical Systems > 2015 > 24 > 2 > 253 - 255
Journal of Microelectromechanical Systems > 2015 > 24 > 3 > 618 - 625
Journal of Microelectromechanical Systems > 2015 > 24 > 3 > 556 - 564
Journal of Microelectromechanical Systems > 2015 > 24 > 3 > 522 - 524
Journal of Microelectromechanical Systems > 2015 > 24 > 3 > 537 - 544
Journal of Microelectromechanical Systems > 2015 > 24 > 3 > 528 - 530
Journal of Microelectromechanical Systems > 2015 > 24 > 3 > 534 - 536
Journal of Microelectromechanical Systems > 2015 > 24 > 4 > 997 - 1005
Journal of Microelectromechanical Systems > 2015 > 24 > 4 > 931 - 939
Journal of Microelectromechanical Systems > 2015 > 24 > 4 > 822 - 830
Journal of Microelectromechanical Systems > 2015 > 24 > 4 > 976 - 981
Journal of Microelectromechanical Systems > 2015 > 24 > 4 > 1092 - 1101
Journal of Microelectromechanical Systems > 2015 > 24 > 4 > 1052 - 1060
Journal of Microelectromechanical Systems > 2015 > 24 > 4 > 1077 - 1084