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The resonance frequencies (eigenvalues) and amplitudes (eigenvectors) of coupled micro/nano-resonator arrays are used in sensors to measure applied physical perturbations such as mass. A higher sensitivity is obtained by measuring amplitude changes rather than frequency variations corresponding to identical perturbations. In this paper we present a new technique by measuring the difference of displacement...
This work introduced a novelty MEMS pyroelectric infrared detector based on LiTaO3 (LT) crystal with high absorptivity amorphous carbon film layer. The LT crystal is thined and polished to 100um thickness and double mentaled for electical connection which will be suspened upon rectangle cave of silicon substrate with mental ring. Amorphous carbon(a-C) could be produced by magnetron sputtering on the...
This paper used an effective annealing process to improve the performance of Parylene C micropore-arrayed membranes fabricated with Parylene C moulding strategy. The results indicated that the annealing treatment at 320°C for 2h in nitrogen sealed the keyholes, which were unavoidably generated in the conventional Parylene C moulding process, because of melting and reflow at high temperature. A chromatic...
We utilise an inverse eigenvalue analysis technique with perturbation analysis to characterise the sensing performance of two coupled MEMS resonators under manufacturing variability. The analysis derives the operating point, sensitivity, linearity, and mass resolution of the experimentally observed performance of an array of two resonators for both eigenfrequency and eigenvector sensing techniques...
This paper presents the fabrication, characterization and application of PEDOT-ionic liquid composite films modified Au microelectrodes. Here only one-step electropolymerization was required for the preparation of PEDOT-BMIMBF4 and PEDOT-BMIMPF6 composite films, which were investigated by cyclic voltammetry (CV), electrochemical impedance spectroscopy (EIS), scanning electron microscope (SEM), and...
We present the first MEMS Solid State Gas Generator (SSGG) for use as a deorbit technology, in conjunction with inflation balloons, for Small-Satellites (<180kg mass). The total system, named the Solid State Inflation Balloon (SSIB), is being designed as a simple, reliable, scalable, low-cost, non-propulsive deorbit system. Small-Sats in Low Earth Orbit (LEO) are required, through multi-national...
Microresonators have an unmatched ability to detect the minute masses of single particles or biological cells. Precise measurement of cell mass, and its physical properties, is necessary to answer fundamental biological questions, with implications in cell biology, pharmacology, and medicine. This paper investigates the use of photonic-crystal-mediated optical trapping toward increasing the precision...
One-dimensional (1D) carbon chains or carbynes consist of unique electronic properties that are highly suitable for electrical sensing of biomolecules such as DNA based on conductance change. In addition, the single atomic width of a carbyne enables the possibility of ultra-high spatial resolution in the measurement of individual DNA bases when compared to other carbon-based nanostructures such as...
To realize a nanogap-based single-molecule label-free detection device for surface-enhanced Raman scattering measurements, a new approach utilizing DNA origami (DO) as a sacrificial nano-structure is proposed. In this approach, gold nanoparticles (AuNPs) are precisely self-assembled to form a dimer structure on opposite faces of a rectangular DO structure. The AuNPs are then fixed on a silicon chip...
In our work, for the first time, we view drug delivery as drug supply chain, and analyze drug supply chain from a system perspective. A glucose-responsive insulin delivery microgel is taken as an example to have a system view of it for a better understanding of its behavior. The benefit of viewing drug delivery as a supply chain system is the possibility of applying the advanced design (such as FBS...
In this work, the manufacturing and characterization of an optically transparent and UV-light photoactive anode, formed of monolayer graphene grown by chemical vapor deposition (CVD) and decorated with a close packed multilayered nanostructured layout of colloidal TiO2 nanocrystals (NCs), are reported. The hybrid material has been prepared by a facile solution-based procedure, which relays on soaking...
This work presents the analysis with experimental verification of ring-diode based readout circuit for MEMS vibratory gyroscopes. Detailed deductions on the C-V conversion and signal demodulation process were given with performance prediction using MATLAB simulation. Experimental verification of the analysis results was also carried out using a MEMS vibratory gyroscope. This work provided theoretical...
Molecular dynamics (MD) simulations focusing on the interactions between MoS2 films and water droplets are carried out in this article. First, the wettability of an ideal MoS2 film is investigated at room temperature, then the influences of ambient temperature and charge density of the MoS2 film on the wetting behaviors of water droplets on the film are also discussed. The simulation results indicate...
Hydrogel scaffolds, both synthetic and biological, are an important component for microscale and macroscale tissue fabrication. Owing to their high water content, hydrogel scaffolds enable the distribution of nutrients and oxygen to support cells in larger constructs. However, thickness of hydrogel scaffolds is still limited by the diffusion rate of nutrients and oxygen, versus the metabolic rate...
This paper shows measurement of very low speed air flow with a new sensor. This micro-machined sensor contains two monolithically integrated orthogonal cells making it prospective to realize three-dimensional (3D) detection of the direction and velocity of air flow at one point. Each cell (vent) has a five-wire configuration, formed by five resistive beams of platinum (with pitch of 354 µm), sensitive...
This work demonstrates highly sensitive miniaturized nanostructured flexible pressure sensing microdevice on polydimethylsiloxane (PDMS) elastomer for various applications, such as artificial e-skin for haptic devices, soft robotic actuator embedded with self-sufficient pressure sensitive awareness system, body implantable catheter system for internal health monitoring, etc. This microdevice has arrays...
Understanding the propagation of LED light in the brain tissue can facilitate the advanced development of LED-based neuroprosthetic devices for optogenetic applications. In this work, the attenuation coefficient of blue LED light in thin tissue slices and Parylene-C films were quantified, which is 19.9 cm−1 and 1.70 cm−1, respectively. Optical simulations in TracePro show good agreement with the experiments.
The use of vibration mode localization in arrays of mechanically-coupled, nearly identical beam-shaped resonators has been studied for ultra-sensitive mass detection. In this paper, for the first time, we thoroughly summarized and compared different sensitivities of various cantilever structures on mass sensing. Meanwhile, from our analytical results, the expression of the highest sensitivity has...
This paper presents an electrochemical microsensor based on ultramicroelectrode array modified with copper nanoparticles to perform trace nitrate detection in potable water. The microsensor is fabricated with standard micromachining technology. As the working-electrode, an ultramicroelectrode array constructed of 421 disk-shaped ultramicroelectrodes provides enhanced electrochemical performance for...
this study presents a simple microfluidic device which can perform sample pretreatment automatically for rapid bacteria detection. Herein, a new approach to rapidly isolate bacteria incorporated with vancomycin-conjugated magnetic beads by using a new membrane-type microfluidic component with a floating block was proposed and its performance was tested and verified. The experimental results showed...
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