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In industry there is an increasing demand for reliable pressure sensors for applications in harsh environment. Pressure sensors working at high temperatures of 500 °C impose new challenges in packaging due to thermal cross sensitivity and temperature induced stresses on the package. Other major issues are to identify stable materials at high temperature and stress-tolerant sensor mounting techniques...
This paper describes initial development and testing of a novel high temperature capacitive pressure sensor system. The pressure sensor system consists of two 4H-SiC 11-stage ring oscillators and a SiCN capacitive pressure sensor. One oscillator has the capacitive pressure sensor fixed at one node in its feedback loop and varies as a function of pressure and temperature while the other provides a...
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