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This paper demonstrates a high accurate split mode tuning fork gyroscope with sub-degree per hour stability. The gyroscope sensing element is fabricated in an 80µm-thick SOI process and sealed in a wafer level vacuum package. Interfaced with an ultra low noise CMOS readout circuit, this gyroscope achieves 0.006 deg/√h angle random walk (ARW) and 0.18 deg/h bias instability. Its corresponding zero...
For the first time, we present a detailed analysis of the noise characteristics in micro-/nano-optomechanical resonators for inertial sensing including optomechanical-based accelerometers and gyroscopes, which provides useful guidance for developing high performance chip-scale integrated optomechanical inertial sensors in the future.
The work proposes a versatile tool for closed-loop operation of MEMS gyroscopes at wafer level, as a mean both to improve existing characterization techniques, and as well to introduce innovative characterization features. These pages specifically address the need for fast measurements of drive-mode quality factors for gyroscopes at large volumes.
Towards the objective of a rate integrating gyroscope (RIG) without a minimum rate threshold and performance limited only by electrical and mechanical thermal noise, we present our progress on a new, generalized electronic feedback method for the compensation of resonator damping asymmetry (anisodamping) and stiffness asymmetry (anisoelasticity) with a new method of RIG operation using self-precession...
Micro-blowtorching is a new, fast and reliable fabrication process to form 3D hollow fused silica shell structures such as high Q-factor birdbath resonators. The performance of the fabricated shell as a resonator can be significantly degraded due to the thermal residual stress during the early cooling phase after fabrication. A multi-step finite element analysis is developed for a qualitative prediction...
It is well known that the rate bias sensitivity to temperature is one of the principal sources of error for MEMS gyros. Frequency locking the gyro resonant frequency to a reference clock using local, low time constant, ovenization as a feedback mechanism has been proposed as a method to greatly improve the stability of gyros under dynamical thermal changes. In order to assess how effective such methods...
This paper develops a new semi-analytical technique for estimating the energy loss in a resonator mounted on a plate substrate. Resonator energy loss due to interaction with its substrate (so called “anchor loss”) has been widely studied, but most treatments have assumed a semi-infinite medium due to the small dimensions of the resonator compared to the substrate thickness. Recent high quality factor...
Conference proceedings front matter may contain various advertisements, welcome messages, committee or program information, and other miscellaneous conference information. This may in some cases also include the cover art, table of contents, copyright statements, title-page or half title-pages, blank pages, venue maps or other general information relating to the conference that was part of the original...
For more than two decades, Sagem has built up its expertise through different developments and applications of CVG (Coriolis Vibrating Gyros). One example is the well-known HRG (Hemispherical Resonator Gyroscope). This paper shows the large panel of applications covered with HRG, in a nominal configuration system and in a redundant inertial skewed system. We also evoke the ultimate performance application...
This paper reports two new milestones in the development of miniaturized Coriolis Vibratory Gyroscopes (CVG) with beyond navigation grade performance. Firstly, a small size and low parts count milli-Hemispherical Resonator Gyroscope (mHRG) based on a drastically simplified production unit is demonstrated with measured 0.00025 deg/rt-hr ARW and 0.005 deg/hr bias. Secondly, real time self-calibration...
This paper reports a highly-sensitive MEMS accelerometer with the thermal-mechanical noise (Bn) of below 50 nG/√Hz (G = 9.8 m/s2) within the footprint of 4×4 mm2. Regarding to the suppression of Bn, we have investigated the relationship between the Bn and the thickness of the proof mass; to downscale the proof mass, we have proposed a multi-layer metal proof-mass structure made of electroplated gold...
This paper reports a new approach for fabrication of high-aspect ratio low resistance vertical interconnects, providing an electrical interface between the front-side and the backside of the Silicon-on-Insulator (SOI) wafer. The method of Thru-Wafer Interconnects for Double-Sided (TWIDS) fabrication of MEMS is based on seedless copper electroplating, and allows for voids free features and high aspect...
In this paper, we present the mechanical sensitivity improvement of a disk resonator gyroscope (DRG) by optimizing the thickness distribution of the nested rings. The mechanical sensitivities of the DRGs with uniform, linearly changing and step changing rings have been simulated. The results suggest that the ring thickness distribution has great influence on the performance of the DRG. Then the optimized...
This study reports a temperature compensation method for a capacitive MEMS accelerometer by using a MEMS double-ended-tuning-fork (DETF) resonator integrated with the accelerometer structure on the same die. The proposed method utilizes the frequency information of the clamped-clamped DETF resonator which is oscillating in a closed-loop operation. In order to compensate the temperature dependence...
The aims of the current work are the research and development and flight tests of fiber-optic gyro for space applications VOBIS. Space-grade FOGs VOBIS are developed for the tasks of spacecraft orientation and navigation at the high orbit and are long-life radiation resistant. Its' estimated operation time is 15 years in high vacuum and radiation environment.
This paper reports the design, fabrication and characterization of a dual mode resonant capacitive MEMS accelerometer. The sensor consists of electrically coupled micro resonators and a proof mass. The applied acceleration causes displacement of the proof mass which changes the electrostatic gap between the proof mass and the sensing electrodes. This not only changes the capacitance between the electrodes,...
This paper reports a MEMS resonator with closed-loop vibration control which can be parametric driven at ambient pressure. Non-interdigitated comb fingers are used as parametric force electrodes and optimized design enables the electrodes to generate large electrostatic stiffness, which makes parametric drive possibly realized at ambient pressure and low Q-factor (65.8). Closed-loop vibration control...
We report on experimental demonstration of force\acceleration sensing based on pull-in voltage monitoring in a fully compliant contactless bistable device, electrostatically actuated by a parallel-plate electrode. The device is suspended using initially curved flexible beams pulled by nonlinear electrostatic forces directed along the beams. A design parameters optimization reduced the sensitivity...
A new design for an optomechanical accelerometer is presented. The design includes a hemispherical optical cavity that can achieve high finesse and a proof mass that is well-constrained by silicon nitride beams. Based on previous work and analysis, the resolution of the accelerometer will be below 1 µg/rt-Hz. Novel MEMS fabrication processes have been developed for the accelerometer that provide optimized...
A gyroscopic detection system, based on magnetic nanoparticles, is developed. The magnetic nanoparticles are suspended in a solution and exposed to a rotating magnetic field. A nanoparticle experience angular deviation from its axis if an external force is applied to the system. Solution composition and oscillation frequency are varied to attempt to optimize the gyroscopic feedback.
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