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This work presents the methodology to synthesize single-walled carbon nanotubes and place them directly on paper utilizing a micro chemical vapor deposition (μCVD) system. In contrast to conventional CNTs (carbon nanotubes) synthesis in high temperature furnaces, the technique of μCVD with localized heating provides the foundation for the direct growth of CNTs on paper. Experimentally, self-aligned...
We report an elliptical micromirror actuated by a curved electrothermal multimorph that bends and twists upon controlled Joule heating. The mirror plate is elliptical with 92 µm major axis and 142 µm minor axis. The micromirror has an optical scan angle of 22° at 0.37 V applied voltage or 9 mW power input. Mirror-center shift produced by multimorph bending and twisting compensate each other and is...
Reflectance-based photonic crystal (PC) sensors with ALD TiO2 pillars for sensing materials with different refractive index (RI) are presented here. The relatively high RI, transparency in visible and IR region and chemical stability make TiO2 a promising material for PC sensors for applications in food or biomedical industry. An IC-compatible fabrication technique called Atomic layer deposition ARrays...
We report design, fabrication and characterization of MEMS enabled electro-thermally tunable 2D photonic crystal prism. The tunable photonic crystal prism was realized by utilizing thermo-optic effect of silicon. A nickel chromium heater was used to heat up the photonic crystal prism. The localized heating on the prism (to 222°C) modifies the photonic band structure, leading to an angle shift (4°)...
This paper describes an optimized out-of-plane assembly method based on a platform with integrated thermal actuators. The platform comprises cavities with overhanging gold clips embedded into a flexible polyimide (PI) cable. Planar micro components are inserted perpendicularly into the platform cavities and electrically connected to the PI cable by bending the gold clips into the cavities. In contrast...
We introduce a new low temperature (280 °C) parylene-C wafer bonding technique, where parylene-C bonds directly a Pyrex wafer to a silicon wafer with either a Si, SiO2 or Si3N4 surface with a bonding strength up to 23 MPa. The technique uses a single layer of parylene-C deposited only on the Pyrex wafer. Moreover, the process is compatible for bonding any type of wafer with small-sized micropatterned...
In MEMS industry, silicon-on-insulator (SOI) wafers are gaining ground from blank silicon wafers as the main starting substrate. Tailored SOI wafers available in the market contain for example buried cavities or a buried gettering layer. Adding another layer in addition to the thermal SiO2 insulator, or replacing it with another material altogether, could be a way to tailor the properties of SOI wafers...
MEMS capacitor switches have been integrated with high voltage CMOS ICs. The MEMS were formed with the final three AlCu wiring levels in SiO2 using a planar sacrificial silicon cavity process. The MEMS cavities were hermetically sealed at less than atmospheric pressure at wafer level. After Pb-free solder bumping, the MEMS chips are packaged in organic laminate packages. The capacitor portion of the...
For avoiding or reducing iatrogenic nerve faction impairment due to excessive nerve root retraction, a silicon piezoresistive pressure sensor is employed at the nerve root retractor, which would offer surgeons a numerical retraction reference and improve the performance of spine surgery. The sensor is used to measure the pressure exerted upon the retracted nerve root during animal experiments. Simultaneously,...
The attachment and detachment of target cancer cells from homogeneous and binary mixtures in antibody-functionalized microchannels have been studied experimentally. Under the same intermediate flow rate, the attachment rate was found to be higher, and detachment flow rate was lower, for cell lines expressing the target receptor at a higher level. For cells that do not express the target receptor,...
Biosensor microprobe arrays for the simultaneous in vivo detection of the neurotransmitters choline and L-glutamate are presented. Combined with a custom-developed CMOS chip, comprising 24 potentiostatic circuits, recordings can be performed at high signal-to-noise ratio in multiple areas of a rat's brain in parallel. The functionalization to create selective enzyme electrodes is based on electrochemical...
A new high performance biomass sensor is presented. The developed sensor shows a high potential to detect small biological agents compared to previous biomass sensors by producing a high quality output signal at atmospheric pressure. The biomass sensor is a micro machined silicon squared plate that is excited in the Lamé bulk acoustic resonant mode at a frequency of 37.8 MHz, quality factor of 10,000...
This paper describes a micro gas chromatography (µGC) system that utilizes three miniaturized components. An optical fiber-based detector is used to monitor the elution peaks of different chemical species through a 25 cm long micromachined separation column. A motionless gas pump based on thermal transpiration is used to transport the analytes in the µGC. Simple pressure programming allows rapid analysis...
In this work, the chemical sensitivity of mass-sensitive chemical microsensors with a uniform layer sandwich structure vibrating in their lateral or in-plane flexural modes is investigated. It is experimentally verified that the relative chemical sensitivity of such resonant microsensors is -to a first order- independent of the microstructure's in-plane dimensions and the flexural eigenmode used,...
We report a novel micromachined X-ray optics using DRIE formed micro mirrors for future space astronomical missions. We have fabricated a test optics and measured its imaging quality using X-rays. We have successfully verified the X-ray focusing using this type of optics for the first time in the world. The obtained angular resolution was about 20 arcmin and 3.1 mm. This result was consistent with...
In the SPM-based microplasma etching system proposed in our previous work, the stable discharge performance of microplasma device in reactive gases is the foundation of the following maskless scanning etching. In order to realize microplasma etching of SiO2 or Si3N4, CHF3 or CHF3/Ar mixtures is chosen as the operating gas. Although discharge characteristics of microcavity plasma devices in rare gases...
For chip-size packaging of optical microsystems, surface activated bonding (SAB) method is one attractive candidate because of its low-temperature process. However, most of packaging processes with SAB method have been performed under ultra-high vacuum conditions, because it needs maintaining the activated surface during bonding process. In this study, we demonstrate low-temperature hermetic sealing...
This paper reports the results of a side-by-side comparison study of HF-HNO3 isotropic etching of circular pits in <111> and <100> single crystal silicon (SCS). These etched holes will be used as sacrificial molds for micro-scale hemispherical resonator gyroscopes (HRGs) made using hemispherical shell resonators. Geometric uniformity of the mold is critical for HRG applications...
An implantable Fabry-Pérot interferometer based pressure sensor is developed. The pressure sensor could be integrated directly onto the inlet shell of a left ventricular assist device (LVAD) to monitor blood pressure in real-time and provide a feedback control signal to achieve the optimal operation of LVAD. The diaphragm of the pressure sensor is made out of biocompatible polymer parylene-C.
This paper describes a Si nano-pillars array for measuring traction forces of one singular filopodium (100–300 nm in diameter). We fabricated the Si nano-pillar which was 110 nm in diameter and 1.5 µm in length. Fibroblasts were cultured on the Si nano-pillar array. The filopodium of fibroblast adhered to pillar and dragged it. We calculated the traction force from the deflection of the pillar. When...
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