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Biometric techniques, such as fingerprint detection, can be applied to identify a specific user for security and safety reasons. We present a capacitive fingerprint sensor that can detect the difference of pressures induced by the ridges and valleys of a finger tip. Post-CMOS fabrication of the 8×32 sensor array is conducted based on wet etch of CMOS metal layers without requiring additional thin-film...
We present a novel approach for the fully automated generation of dilution series using a disposable microfluidic cartridge. Fluids are metered, mixed and routed without active valving by defined rotational speed only. As a processing device, a standard lab centrifuge can be used. The dilution ratio can be freely choosen by loading the corresponding volume of sample into the cartridge without the...
In this paper a humidity sensor concept is presented which is fully fabricated by inkjet printing. In the first step conductive finger electrodes are inkjet printed on flexible polyimide substrate with a silver neodecanoate based ink. Afterwards a humidity sensitive layer is printed upon using a polymer particle based ink. Two approaches are presented for minimizing the line width of the electrode...
We present the design, fabrication and testing of a high-resolution ground reaction sensor cluster (GRSC) as an auxiliary sensor for pedestrian navigation. The GRSC consists of a flexible high-density array of compressible, elastomeric capacitive pressure and two-dimensional shear sensors. When placed at the heel of a boot, the 169-cell GRSC measures detailed information about the position and motion...
We are investigating a class of nonlinear resonators which feature parametric excitation when driven by an electrostatic force whose linear and cubic stiffness can be parametrically controlled by a pump drive oscillating voltage applied across the non-interdigitated comb fingers. The perturbation theory is employed in solving the Mathieu equation to quantitatively explain the nonlinear resonance phenomenon...
This study employs the low temperature UV-glue dispensing and curing processes to bond a bulk block on a suspended CMOS MEMS stage to increase the proof-mass of tilt sensor. Thus, the sensitivity and resolution of CMOS MEMS capacitive-type tilt sensor are significantly improved. Such simple post-CMOS process inherits from the mature technology for packaging. In application, this study successfully...
‘Human-powered’ microdroplet generators are ideal for droplet-based point-of-care diagnostics applications. Here we present a versatile ‘finger-powered’ microdroplet generator. The prototype system was fabricated via polymer-based micromachining processes. In this work, we have achieved: (1) the use of a human finger as the actuation force for droplet generation, (2) an integrated pumping system for...
We report here the fabrication of comb drive III-nitride micro mirror on an III-nitride/silicon platform. Silicon substrate is first patterned from the backside and removed by deep reactive ion etching (DRIE). III-nitride microstructures are defined on freestanding III-nitride slab by backside alignment technique and generated by fast atom beam (FAB) etching. The fabricated comb-drive III-nitride...
This paper presents a centrifugo-magnetophoretic principle for the 2-dimensional separation of particles towards cell separation applications. Multi-force particle separation is achieved through the favorable combination of centrifugal sedimentation and magnetic deflection, while a stopped-flow mode (i.e., no fluid flow, mere sedimentation) is implemented to minimize divergent flow-lines and hydrodynamic...
We describe the design, fabrication, and high vacuum packaging process of 2D scanner. The resonant frequencies of 2D scanner after packaged in vacuum are 30 kHz and 290 Hz for the inner mirror and the gimbal frame, respectively. The rotation angles of packaged 2D scanner are 25° and 16° at driving voltages of 20 V and 12 V for the inner mirror and the gimbal frame, respectively. To compromise the...
An Ultra-Low-Power readout architecture for capacitive MEMS-based accelerometers and strain sensors is presented. The system can read both accelerometers and strain sensors in a half-bridge configuration. The gain is controlled by integrating pulses from the excitation voltage allowing accurate control of the Signal-to-Noise ratio. A Figure-of-Merit of 4.41×10−20 F√(W/Hz) was achieved for a sensor...
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