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Large scale HgTe nanowires have been grown from Te nanowires by solution approach at low temperature. The widths are in the range 10-20 nm, with lengths up to 1mum. The nanowires have been characterized by uv - vis spectra, scanning electron microscopy, energy-disperse X-ray spectroscopy (EDS), transmission electron microscopy. The effects of growth temperature and time have been investigated and...
This paper reports the completion of fundamental fluidic operation considered essential to build digital microfluidics system, which can be used for micro total analysis system (mu-TAS) or lab-on-a-chip by the coplanar electrode type of EWOD device. Coplanar electrode type of EWOD chip could be designed as a novel tool to delivery many kinds of bio-samples, such as DNA, enzyme, and salt solution without...
The thesis investigates the generation of Lamb waves on PVC (Polyvinyl chloride) substrates using current-induced Lorentz force. Standard LIGA (Lithographie GaVanoformung Abformung) process was used to fabricate single and double side meander line structures which have line width around 0.6~1 mm on PVC substrates. The meander line structure was placed under a transverse permanent magnetic field and...
It's a challenge to figure out the frequency response of a capacitive MEMS device due to the large coupling noises introduced by the parasitic capacitors. We present a new method to measure the frequency response based on the third harmonic detection. Different from previous methods, the frequency of the measured signal in our method is triple as that of the exciting voltage, so there is no coupling...
Horizontally aligned single-walled carbon nanotubes (SWNTs) were synthesized on diverse substrates by thermal chemical vapor deposition using two different kinds of catalyst sources. Different from the methods to synthesis horizontally aligned SWNTs reported by other groups, our method does not need any external force such as electrical field and special substrates. Instead of using a high speed gas...
In this paper, the resistivity and temperature coefficient of resistance (TCR) of nanostructured Ta-Si-N thin films fabricated on silicon substrate by reactively cosputtering have been studied. The substrate bias was controlled from 0 to -200 V at a fixed nitrogen flow ratio of 5 FN2% (FN2/ (FN2+FAr) times 100%) to study the electrical properties of different Ta-Si-N films. The Ta-Si-N films with...
This paper presents a new 2D structure to measure a chemotactic migration of adhesive cells for analysis of cell kinetics. This structure was designed to overcome Boyden chamber's disadvantages and made real-time measurement possible in 2D. The 2D chip was made of PDMS and glass for transparency. To create more than 2% of concentration gradient for chemotaxis measurement, the PDMS chip has a gradually...
Spindle-shaped lead selenide (PbSe) nanocrystals were synthesized by solution processing synthetic method for the first time. The prepared PbSe nanocrystals were characterized by X-ray diffraction, transmission electron microscopy and near-infrared absorption spectroscopy. X-ray diffraction pattern shows that the synthesized PbSe nanocrystals have cubic rock salt structure. Spindle-shaped PbSe nanocrystals...
The Fe3+-doped and undoped TiO2 nanoparticles have been prepared employing sol-gel method with hydrolysis mechanism. The nanoparticles were characterized with powder X-ray diffraction and scanning electron microscopy. The experimental results showed that Fe3+-doped TiO2 possess the average particle size in the nanoscale range. The photocatalytic performance of the nanoparticles was observed for degradation...
In order to study the electrical contact property at metal film interfaces, a NiCr/TiW film of about 40 nm/30 nm were deposited on the silicon substrate by magnetron sputtering. The mechanical and electrical properties of the film were studied by nano-ECR system. Different loads from 1500 muN to 3500 muN with voltage of 5 V were applied to the sample. Changing of the electrical property in NiCr/TiW...
The approach to realize the electrical interconnect and qualities of the contact have a direct impact on the performance and reliability of devices. Herein, Si-Au/Pt/Ti contact structure is fabricated using anodic bonding as a novel approach to realize the electrical interconnect. In order to evaluate the qualities of the anodic bonded contact, the contact resistance is extracted. The cross-bridge...
A white-light source operated polymer-based micromachined Fabry-Perot chemo/biosensor is reported for the first time. It is a refractive-index sensitive optical sensor. The transducing signal varies upon the changes of the effective index of refraction in the sensing area, which is the Fabry-Perot cavity. This chemo/biosensor is made with PDMS and glass. Specifically, the micromachined Fabry-Perot...
Fuel cells will be applied extensively in the future as renewable energy sources, explaining why a considerable amount of research has addressed this topic. However, among the various problems encountered in the mass production of fuel cells that have yet to be solved include those associated with the bipolar plate, flow channel, catalyst, membrane electrode assembly (MEA), gas diffusion layer (GDL)...
Polypyrrole(PPy) nanowires modified electrodes were developed by template-free electrochemical method based on graphite electrode. The Ag/PPy nanowires composited modofied electrodes were prepared by method of electrochemical deposition Ag with the condition of constant current density. The electrocatalytic reduction of nitrite based on Ag/PPy nanowires composited modified electrodes was developed...
This paper reports the characterization of bulk titanium deep etching using inductively coupled chlorine plasma using SU-8 as softmask. SU-8 has many advantages over the traditional employed hardmask, such as selective stripping, cost efficiency and the ability to accommodate ultra deep etching. The effects of process parameters (ICP source power, platen power and Cl2 flow rate) on etch rate, selectivity...
Deep trench structures have been widely introduced to the IC and MEMS devices, such as bottle trench structures with an aspect-ratio of more than 50:1 has been adopted to form the capacitors on DRAM. The fabrication of this kind of structures challenges the traditional surface profile and shallow trench measurement technology. A polarized Fourier-transform infrared (FTIR) reflectance spectrometry...
For electrochemical gas sensors, solid electrolytes play increasingly significant role in improving stability, life-span and other properties. One new but emerging solid electrolyte LaF3 is attractive because of its possible application at room temperature, in addition to other advantages and it has been investigated for measuring various types of gases. Since Pt/LaF3 sensitive interface is a core...
In this paper, we report a novel method for extracting the angular parameterized macromodels of the microstructures with a large number of input terminals. First, the macromodels are extracted by combining the block Arnoldi approach with the superposition theory of linear systems. Then, the angular parameterization for the macromodels is achieved by applying the equivalent matrix coordinate transformation...
Complementary metal oxide semiconductor (CMOS) transistors have reached the nanometer geometry scale (1-100 nm) where they are difficult to be scaled anymore due to essentially quantum mechanical properties effects. This paper discusses emerging non-CMOS nanoelectronic devices (nanodevices) that could potentially be able to circumvent the CMOS scaling problem. First we propose a taxonomy, which classifies...
A kind of micro piezoresistive pressure sensor with stable performances under high temperature is designed based on the silicon on insulator (SOI). Through analyzing the stress distribution of diaphragm by finite element method (FEM), the model of structure was established. The fabrication operated on SOI wafer, which can be used in extreme high temperature environments, and applied the technology...
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