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In this paper, we present two designs for developing a biocompatible affinity MEMS glucose sensor. Based on these designs, two devices were fabricated and characterized. These devices, consisting of a micro-cantilever or membrane situated inside microchambers, are driven by a remote magnetic field and separated from the sensing environment by a semi-permeable membrane. A change in viscosity induced...
SAW actuators are required for a micro actuator due to their high output force and direct drive. A new type IDT, Floating Electrode Unidirectional Transducer (FEUDT) is implemented by using MEMS technologies in the paper. The optimal designs were proposed and compared with others in the end. The dimensions of the FEUDT are 5 mm aperture size, 80 mum pitch, 6.7 mum strip width, 0.8 mum thick. In comparison...
This paper presents a novel micro-gyroscope which is resistant to shock and sensitive to biaxial applied angular velocity. This device has very simple structure and is completed solid. The vibration of piezoelectric bulk (PZT), which is excited in special resonance mode, is used as reference vibration. When angular velocity is applied to x or y axis, voltage is generated by coriolis force at different...
A novel kind of MEMS micro-gyroscope, piezoelectric micromachined modal gyroscope (PMMG), is introduced in the paper. PMMG works with the special vibratory mode of solid material, and it is a kind of solid-state micro-gyroscope, which is different from micromachined vibratory gyroscope. There is no moving part and suspended structure in PMMG, and it is robust for the higher resistance to shock and...
Based on previous experimental results of the Carbon Nanotubes-based (CNTs-based) micro bubble generation in static water presented by our group, the dynamic characteristic of CNTs-based micro bubble will be introduced in this paper. The movement of CNTs-based micro bubble is categorized into two forms: micro bubble transportation in the micro channel driven by aqueous flow induced by the micro pump...
In this paper, molecular dynamics simulation is carried out to investigate the mechanical properties and dynamic behaviors of carbon nanotubes with vacancies and related defects. We have shown the Yang's modulus and tensile strength of nanotubes with vacancy-related defects are dependent on the characteristics of vacancies. Meanwhile, the phonon density of state (DOS) are used to study the vibration...
This paper deduces a remarkably precise analytical formula for calculating the fundamental resonant frequency of V-shaped cantilevers using Rayleigh-Ritz method. This analytical formula, which is very convenient for MEMS sensor design, is then validated by ANSYS simulation. This formula raises a new perspective that, among all the V-shaped cantilevers, the simplest triangular cantilever can lead to...
In this investigation, the micro-cross beam is fabricated by the method of silicon bulk micromachining. The first torsion natural frequency included a torsion factor and the second bending natural frequency can be derived by using the characteristic of the first two decoupled vibration modes of the micro-cross beam. The Poisson's ratio included a torsion factor and a frequency ratio can be defined...
In this paper, a highly sensitive temperature sensor based on quartz tuning fork resonators is reported. The temperature sensor is configured by ZY (110deg/10deg) Cut quartz crystal wafer based bulk acoustic wave (BAW) tuning fork resonators whose operating frequency is at 31 KHz. The ideal thermo-sensitive ZY cut for quartz tuning fork resonators is analyzed with the theory. The characterization...
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