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This paper presents a new roller-based nano-imprinting method based on the Infrared assisted metal transfer technique. It utilizes a silicon mold which is deposited with a thin metal film for pattern transferring. Another metal film which acts as an adhesion layer is also deposited on the substrate surface. An infrared light source incident from the substrate side heats up the metal films. After imprinting,...
This paper reports the characterization of bulk titanium deep etching using inductively coupled chlorine plasma using SU-8 as softmask. SU-8 has many advantages over the traditional employed hardmask, such as selective stripping, cost efficiency and the ability to accommodate ultra deep etching. The effects of process parameters (ICP source power, platen power and Cl2 flow rate) on etch rate, selectivity...
In this work, we demonstrate a novel SU8/SiO2 /PMMA trilayer nanoimprint technique to fabricate the silicon nanowire (SiNW) sensor used for gas detection. The SiNW sensor fabricated in our experiment is based on the silicon on insulator (SOI) substrate which is doped by boron with a dopant concentration of 8 times 1017 cm-3. Two nanowire sensors with different linewidths as well as a thin-film plane...
A novel microfluidic platform is presented for sorting by size dissociated neurons, glia and stem cells from biopsies of the central nerve system. A highly biocompatible aqueous polymer solution was used in hydrodynamic spreading controlled cell separation. Before cell separation, particles were used for demonstration. To verify the results the fractions were studied using flow cytometry. Further,...
Silicon microchannel plates have been explored intensively for numerous applications especially for ultraviolet image detection. The electrochemical etching in hydrofluoric acid-based solutions is known as a technique for porous silicon formation. The function of backside illumination and temperature in the electrochemical etching of large-size and high aspect ratio silicon microchannels plates has...
A novel hermetic wafer level packaging technology is presented in this paper, which was realized by the aid of low temperature direct bonding. One silicon wafer with etched cavities and the other bare wafer, which acted as cover and substrate respectively, were bonded to demonstrate the feasibility of this technology. The bonding surfaces of both wafers were activated hydrophilically by a series of...
The most difficult challenges in fabricating SWCNT-based nanosystems or nanodevices have proven to be the assembly and anchoring of SWCNTs to form a stable physical and electric contact between SWCNTs and the electrodes. For example, for SWCNT-based nanosensors or field effect transistors (FETs), the need to fix the SWCNT between electrodes is extremely important, i.e., it affects the electronic transport...
The etch-back of anodic bonded silicon-on-glass wafer using ultrasonic agitation to obtain uniform silicon film and good surface finish in deeply dissolved silicon-on-glass (DDSOG) process has been studied in KOH solution. Etch-back characteristics of p-type (100) 4 inch SOG wafer have been explored under the different ultrasonic power. It has been observed that the characteristics of etch-back such...
An unique, sensitive, and highly specific immunoassay system using gold nanoparticles and surface-enhanced Raman spectroscopy (SERS) is described. To demonstrate the analytical capabilities of the new technique, Raman reporter (DTNB) that is coimmobilized with biospecific anti-protein A on gold nanoparticles (AuNP). Anti-protein A-AuNP-DTNB, which combing both electromagnetic field and chemical enhancement,...
We have utilized a plasma based patterning technique, that we have developed, to study the effects of micrometer and submicrometer scale surface functionalization on cell proliferation and morphology. We have applied this method to cellular patterning and examined the response of mammalian cells to patterns of hydrophobic and hydrophilic areas created directly on polystyrene substrates. We have observed...
The involvement of nanotechnology in biology, biomedical devices, and analytical sciences provides tantalizing opportunities to miniaturize biosensing platforms for applications in diagnostics, biotechnology, environmental monitoring, pharmaceutical research, and research in life sciences at large. Key for realizing these opportunities is the accurate patterning of protein receptors on surfaces and...
Superhydorphilic polyester film has been obtained by oxygen plasma treatment to maintain optical clarity under high relative humidity. The original and treated films are simultaneously exposed to the vapor from hot water. The latter keeps its optical clarity because the condensed water formed a thin film on it instead of droplets for the former. Compared with the widely used coating method, plasma...
Assembly of colloidal arrays has attracted much attention over the past decade. Surface property and topology play important roles in the assembly of colloidal patterns and layers on various substrates. In this paper, we report on a novel micropattern-assisted nanoassembly (muPAN) method to organize highly ordered nanocolloidal arrays onto a nonfouling polymer surface. Polyethylene glycol (PEG) hydrogel...
Presently, inexpensive hand-held corona system has been widely used as an alternative for PDMS-PDMS bonding, considering the fact that it is both effective and highly portable. In the present work, to optimize this corona-triggered bonding technique, different PDMS curing conditions and corona exposure time have been tested. The hydrophobic recovery of the corona treated PDMS surface was quantitatively...
A new process method is developed to fabricate beam into nanometer scale in width. Assisted by Focused ion beam (FIB), one 122 nm silicon nanobeam is obtained on (110) Silicon-On-Insulator (SOI) substrate, based on the material and process properties of crystal silicon. After KOH etching, sidewalls with (111) terminations are all vertical to (110) surface plane. This presented process method has some...
In this article we demonstrated a way to transport droplets by an arrowed micro-pillar array surface with hydrophobic parylene. We developed successfully that the lightly hydrophilic parylene surface can be changed to hydrophobic one treated with fluorine-based plasma (CF4 and SF6) for 10 seconds. Otherwise, we designed the ratchet pattern similar to the one proposed by A. Shasty in 2007. The droplet...
This paper reports a method for the Layer-by-Layer (LbL) nanoscale coating of microparticles using a droplet microfluidic device for the first time. This so-called droplet-LbL PDMS microfluidic device consists of a droplet generator and a mixing channel. The nanoscale coating of PDDA layer on the charged microparticles called polymethacrylate has been successfully demonstrated, resulting in the change...
This paper reports a rapid, simple and direct method for the synthesis of gold nanoparticles (AuNPs) in polypyrrole (PPy) film, which provides a biocompatible matrix for the strong adsorption of antibodies. The electrochemical synthesis of AuNPs/PPy composite on gold or carbon electrode occurs within 20 minutes, and does not involve addition of any nanoparticles or reducing agent. This method is compatible...
Biofouling is a major problem for shipping, ecosystems and aquaculture industry. From the analysis of the factors affecting the biofouling process, the interference with the settlement and attachment mechanisms is the most promising environmentally benign option.This can be accomplished in two main ways: imitation of the natural antifouling processes and modification of the characteristics of the...
Two kinds of nano-scale typical structures were fabricated for characterizing line edge roughness (LER) and line width roughness (LWR). With Cr and Si3N4 thin films alternately deposited on a silicon substrate and electronic beam lithography employed on a positive resist ZEP520 layer, a nano-scale multiple linewidth standard and a nano-scale grating structure were processed respectively. In regard...
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