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This paper reports the characterization of bulk titanium deep etching using inductively coupled chlorine plasma using SU-8 as softmask. SU-8 has many advantages over the traditional employed hardmask, such as selective stripping, cost efficiency and the ability to accommodate ultra deep etching. The effects of process parameters (ICP source power, platen power and Cl2 flow rate) on etch rate, selectivity...
This paper describes a novel method of producing released MEMS devices with large exposed area based on SOI wafers. First, we discussed when the notching effect happens, from our experiments, for 30 mum SOI wafer, the gap between lines should be below 14 mum to initiate notching. Then, the release structure for the large exposed area device is designed, which opens up opportunities for the design...
A novel maskless micro-nano plasma etching system based on parallel probe actuation is proposed. The advantages of this system are high etching rate, high fidelity, simple-structure, and flexible to fabricate various material. As a key component of the system, a microplasma reactor of metal-dielectric-metal sandwich structure with inverted, square pyramidal hollow cathode is designed and successfully...
This work presents the design, fabrication and experiments of a new blood-filtering chip based on SU-8 and PDMS. The main function of this blood-filtering chip is to filter the leukocyte out of the blood. This new leukocyte filtered chip is composed of three parts: cover plate, filtering plate and receiving plate. The shape of the transfusing channel is optimized by simulation. The new blood-filtering...
We have utilized a plasma based patterning technique, that we have developed, to study the effects of micrometer and submicrometer scale surface functionalization on cell proliferation and morphology. We have applied this method to cellular patterning and examined the response of mammalian cells to patterns of hydrophobic and hydrophilic areas created directly on polystyrene substrates. We have observed...
Superhydorphilic polyester film has been obtained by oxygen plasma treatment to maintain optical clarity under high relative humidity. The original and treated films are simultaneously exposed to the vapor from hot water. The latter keeps its optical clarity because the condensed water formed a thin film on it instead of droplets for the former. Compared with the widely used coating method, plasma...
Assembly of colloidal arrays has attracted much attention over the past decade. Surface property and topology play important roles in the assembly of colloidal patterns and layers on various substrates. In this paper, we report on a novel micropattern-assisted nanoassembly (muPAN) method to organize highly ordered nanocolloidal arrays onto a nonfouling polymer surface. Polyethylene glycol (PEG) hydrogel...
In this article we demonstrated a way to transport droplets by an arrowed micro-pillar array surface with hydrophobic parylene. We developed successfully that the lightly hydrophilic parylene surface can be changed to hydrophobic one treated with fluorine-based plasma (CF4 and SF6) for 10 seconds. Otherwise, we designed the ratchet pattern similar to the one proposed by A. Shasty in 2007. The droplet...
Enzyme free glucose micro-biosensors with nanoporous platinum (Pt) electrode were fully packaged with biocompatible Nafion membrane and characterized in bio-fluidic solutions. Three different packaging methods which were a dip coating, spin-casting, and chemical bonding were applied, characterized, and compared to find an optimal one for anti-fouling of protein in bio-fluidic solution. In human plasma...
The aim of the study is to evaluate the cell affinity of poly(3-hydroxybutyric acid-co-3-hydroxyvaleric acid) (PHBV) thin films using a parallel plate flow chamber system. The PHBV thin films were modified by anhydrous ammonia gaseous plasma treatment. Mouse 3T3 fibroblast cells were seeded on bare and plasma modified PHBV thin films, respectively. A laminar flow enforces the cells on these films...
In this manuscript we designed and fabricated two types of microfluidic chips for plasma isolation from whole blood by using micro/nano structures. One type of the microchips was designed based on the principle of crossflow filtration, while the other was based on plasma skimming effect. The microchips were fabricated by MEMS technology, which were made of a silicon wafer and a PDMS-glass cover. The...
Use of this work proposes a novel technique to induce the attachment of tumor cells to the micropatterns of glutaraldehyde (GA)-crosslinked gelatin. It provides another method to crosslink gelatin other than using the photo-sensitizing agents or selective GA-crosslinked technique. The micropatterns of GA-crosslinked gelatin are fabricated by O2 plasma etching process. This novel technique can ensure...
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