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According to the characters of CE signal, improved wavelet thresholding with translation invariant was described to denoise for microchip capillary electrophoresis in this paper. The improved thresholding function has muti-derivative compared with the soft thresholding. The denoising method can not only remain the geometrical characteristics and keep the amplitudes of the original electrophoresis...
Parylene nanomechanical cantilevers with integrated piezoresistors were proposed for biochemical sensing based on surface-stress measurement. By using polymer as the cantilever material, the sensitivity is significantly increased. Simultaneously, parylene piezoresistive cantilevers exhibit different behaviors compared with their more rigid counterparts. Therefore new design guidelines need to be developed...
We presents a micromachined interferometric accelerometer fabricated using Silicon Glass Anodic-bonding and Deep Etching Release (SGADER) process. The accelerometer consists of a glass-silicon-glass sandwich structure. A proof mass is suspended by beams attached to the silicon support substrate and a diffraction grating on the bottom glass substrate resides under the proof mass. The sandwich structure...
Silicon nanowires (SiNWs) fabricated by MEMS technology and its DC response to antigen (HBsAg) was demonstrated in this paper. Anisotropic self-stop etching was employed to ensure low cost batch production. Electrical characterization revealed that, field effect of such device, with SiNWs' width and thickness in the order of 10 nm, guaranteed linear resistance modulation in a wide range, which made...
We have inquired further into the interference effect between active circuit and spiral inductors. Through the VCO's integrated with MEMS inductors, we investigated the phase noise characteristics according to inductor's position in circuits. These experimental results were further studied by electromagnetic theory and simulation. We have concluded that the magnetic field induced by inductor have...
In this paper, design and characterization of a 18 V switched-capacitor CMOS interface circuit for the closed-loop operation of a capacitive accelerometer is presented. The pendulous silicon accelerometer operates in atmosphere pressure and is designed for non-peaking (low-Q) response with a sensitivity of 0.5 pF/g without vacuum packaging. Test results shows that a full scale acceleration of plusmn15...
CMOS interface circuitry for closed-loop capacitive MEMS accelerometer is presented in this paper. The switched-capacitor (SC) charge integration method is used for the capacitive sensing, correlated double sampling (CDS) technique is introduced to compensate the finite gain of operation amplifiers, reduce 1/f noise and offsets. In order to enhance stability of system and the frequency response performance,...
In the paper a newly developed fuzzy adaptive Kalman filter (FAKF) algorithm is presented which is applied in miniature attitude and heading reference system (AHRS) based on MIMU/magnetometers. The method is to deal with time variable statistic of measurement noise in different working conditions. By monitoring the innovation of sensors data in realtime, the Kalman filter tunes the measurement noise...
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