The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
A vertical-driven resonant micromechanical electrostatic field sensor (EFS) has been firstly developed in this paper. The sensor architecture has three major blocks: a parallel-plate driving electrode, a shielding electrode and a sensing electrode. Unlike other devices, there are many holes in the shielding electrode for modulating the electric field. For improving the signal-to-noise ratio (SNR),...
The configuration of a novel MEMS interdigital transducer (IDT) dual-axis surface acoustic wave (SAW) gyroscope is presented in this paper. There have been an increasing demand for gyroscopes with small size and low cost in military and commercial systems, however rotator gyroscopes, laser gyroscopes, fiber optic gyroscopes, and silicon-based MEMS gyroscopes can't meet the demand. Although the MEMS...
In this paper, we present two designs for developing a biocompatible affinity MEMS glucose sensor. Based on these designs, two devices were fabricated and characterized. These devices, consisting of a micro-cantilever or membrane situated inside microchambers, are driven by a remote magnetic field and separated from the sensing environment by a semi-permeable membrane. A change in viscosity induced...
Fuel cells will be applied extensively in the future as renewable energy sources, explaining why a considerable amount of research has addressed this topic. However, among the various problems encountered in the mass production of fuel cells that have yet to be solved include those associated with the bipolar plate, flow channel, catalyst, membrane electrode assembly (MEA), gas diffusion layer (GDL)...
A kind of micro piezoresistive pressure sensor with stable performances under high temperature is designed based on the silicon on insulator (SOI). Through analyzing the stress distribution of diaphragm by finite element method (FEM), the model of structure was established. The fabrication operated on SOI wafer, which can be used in extreme high temperature environments, and applied the technology...
A novel integrated high sensitivity displacement sensor based on micro ring resonator is described. It includes the high sensitivity of optical sensors and the compactness and potential for mass production of the MEMS sensors. In this design, GaAs-Al0.6Ga0.4As platform was chose for its high-index contrast. A bus waveguide couples to a micro ring resonator and they are integrated on the supporting...
Following the economy of our country rapidly develops in recent years, more and more people possess vehicles of their own, and the number of urban vehicle is increasing fast as well. All of these directly challenge the management of urban traffic and normalization of driving behavior. According to actual request for urban traffic, Vehicle Supervision System Based on MEMS Geomagnetic Sensor, for short...
High sensitivity capacitive humidity sensor based on novel designed PI with cavity structure fabricated by MEMS technology is presented in this paper. The humidity sensor consists of a substrate with a cavity, a bottom electrode, a sensing layer, and a comb-shaped top electrode with branches. The cavity structure of the substrate was formed to protect the sensing material and improve reliability....
This paper presents a microfabricated 2 times 3 array oxygen sensor integrated with heaters and temperature sensors for measuring cellular respiration level in a solution containing cells. The proposed oxygen sensor consists of 2 times 3 array Clark-type sensors, heaters, and temperature sensors on the substrate. Pt was used for temperature sensors, working electrode and counter electrode of Clark-type...
Pb1-xSrx (Zr0.53Ti0.47) O3 (PSZT) thin films have been fabricated on Pt/Ti/SiO2/Si substrates by a sol-gel method combined with a rapid thermal annealing process. It is shown that the introduction of Sr2+ into the PZT thin films favors the growth of (111) orientation. The orientation ratio of (111) is increased from 0.304, 0.475 to 0.849 with the increase of the x value. The dielectric measurement...
We present an advantageous fabrication technology for the integration of pressure sensor into the multi-sensor for micro weather station. Differing from traditional silicon piezoresistive or capacitive pressure sensor, we use platinum piezoresistive pressure sensor in the integration, which can greatly simplify the whole process and also has an excellent performance. We also use adhesive bonding with...
This paper describes a novel method of producing released MEMS devices with large exposed area based on SOI wafers. First, we discussed when the notching effect happens, from our experiments, for 30 mum SOI wafer, the gap between lines should be below 14 mum to initiate notching. Then, the release structure for the large exposed area device is designed, which opens up opportunities for the design...
A micro flow sensor with high temperature coefficient of resistance (TCR) is very important because of its high sensitivity of flow sensors. Different from the conventional positive-TCR Pt film used in micro flow sensor with self-heating, higher negative-TCR micro flow sensor without self-heating is developed and fabricated in this research. The novel TaN-material micro liquid flow sensors are fabricated...
The production of useable energy is today a global issue and the search for alternative energy sources is very challenging. Therefore, scientists have' tried hard to identify new alternative energy sources. Fuel cells have potential as an indispensable source of electrical power. However, the mass production of fuel cells encounters various problems, which are yet to be solved, such as determining...
A single chip MEMS sensor was designed for detecting the Casimir force using parallel plate geometry. The design methodology is aimed at maintaining the parallelism between the Casimir force boundaries. The Casimir force can be estimated from the measurable capacitance shift produced by the moveable boundary. The signal to noise ratio has been calculated to be in excess of 100 without averaging due...
Silicon nanowires (SiNWs) fabricated by MEMS technology and its DC response to antigen (HBsAg) was demonstrated in this paper. Anisotropic self-stop etching was employed to ensure low cost batch production. Electrical characterization revealed that, field effect of such device, with SiNWs' width and thickness in the order of 10 nm, guaranteed linear resistance modulation in a wide range, which made...
A microfabricated breath sensor based on multi-walled carbon nanotubes (MWCNTs) has been designed, developed and tested. This sensor has a simple capacitor structure, including a pair of metal electrodes fabricated by micromachining, which are then coated by a layer of carbon nanotubes. This structure takes advantage of the unique electrical property of MWCNTs in the small gap space as a function...
This paper presents a simple and low-cost flip chip bumping method with vertical feedthroughs for MEMS WLCSP. The vertical feedthroughs are fabricated on glass wafer using sand-blasting, and these provide inherent aligning jig for micro-ball arrangement. The experimental evaluations using MEMS accelerometer are also presented. The proposed method can be a more cost-effective solution by eliminating...
A thermal driving and piezoresistive sensing MEMS cantilever resonator has been proposed and developed to construct trace gas detection sensors. The problem of integrating vibration structure, transducers and electric elements is the main concern in the design and fabrication of the resonator. In this paper, the parameters and the configuration of the resonator are discussed, the fabrication process...
A MAG-muIMU which is based on MEMS accelerometers, gyroscopes and magnetometers has been developed for real-time estimation of human hand motions. Appropriate filtering, transformation and sensor fusion techniques are combined in the Ubiquitous Digital Writing Instrument (UDWI) to record the handwriting on any surface. However, because of the sensors' intrinsic biases and random noise such as circuit...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.