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For future 65 nm and smaller nodes, thermal anneal processes in the ms and mus range are required. Based on laboratory tests using the line scan method, an R&D system has been developed.
Micron-size channels have been made inside silicon by femtosecond laser-assisted HF etching. The etching is guided by localized carriers generated via two-photon absorption. Its potential of 3-D drilling has been demonstrated.
2.35 mum GaSb-based diode lasers with QW compressive strains of 1.2 and 1.7% were designed and fabricated. Devices with heavily strained active region exhibit three times higher differential gain and half the threshold current.
A novel approach is used to enhance by nearly two orders of magnitude the conversion efficiency of a 125 nm-coherent source, based on four-wave mixing in room-temperature mercury vapor. Saturation issues are observed and discussed.
We present a theoretical and experimental analysis of two-grating phasing in a broadband pulse mosaic compressor. The phase defaults induced by misaligned gratings and the grating gap effect are studied in a mosaic compressor scheme.
We report the first production of quasi-monoenergetic proton beams using laser plasmas. Supported by scalability studies, this puts laser plasma acceleration clearly in the scope of medical application.
We report the findings of a detailed study of the impact of the Vulcan OPCPA pre-amplifier on contrast. Using near-field apertures, the ASE pedestal was reduced to 4x10-8 of the intensity of the main pulse.
We present a sensitive laser vibrometer using a photo-electromotive force (photo-EMF) sensor and a pulsed light source. This system demonstrates real-time vibration detection on rough surfaces with displacements as small as 180 pm.
The height, position, and even spacing of peaks in stepwise and direct multiphoton ionization spectra can be coherently controlled through the time delay or relative phase of two ultrashort laser pulses.
Laser micro-processing techniques are becoming commonplace in the industrial production of high-tech devices. As the limit of conventional manufacturing is reached, laser micro-processing presents itself as an enabling technology in a wide range of applications.
The effect of focusing conditions in laser wakefield acceleration is studied. Short focal length geometries produce large dark currents while longer focal lengths produce narrow energy spread beams.
We will review the status of current laser based crystallization processes, and discuss the specifications and the critical design aspects of the laser and of the optical system developed for the TCZ production tool.
Based on our successful fast ignition result a 10 kJ Petawatt laser is under construction. After reviewing the FI experiments, our integrated experimental plan will be shown with the report of the new laser system.
We demonstrate the highest contrast -1011 multi-terawatt CPA Ti:sapphire laser by applying a modified XPW method. This method produces a contrast improvement by direct amplification of the oscillator pulse without double CPA system.
Periodic nanoripples of tungsten on sapphire were grown using linearly-polarized femtosecond laser. The ripple orientation was found parallel to laser polarization. By scanning the substrate, we demonstrated tungsten grating with periodicity around 150 nm.
Electrons accelerated in laser plasma generated gamma-bremsstrahlung. The gamma-radiation was used for radiography with a time-resolved imaging system. We determined the modulation transfer function of the imaging system and have produced position and time-resolved gamma-images.
We discuss a regime of high-harmonic generation in waveguide where sub-femtosecond EUV pulses can be generated via a mechanism relatively insensitive to carrier-envelope phase. This method also allows for control over EUV energy and bandwidth.
In this work we examine laser treatment of unaligned bulk nanotube samples as a potentially simple and fast purification method. The effects of laser treatment by a 248 nm excimer laser at various pulse lengths and time of exposure are evaluated to gain control and selectivity for the removal of carbon impurities from nanotube samples.
We demonstrate possibility of multi-MeV electron acceleration and ultra-short electron bunch formation in the most basic ldquotransverserdquo geometry of an electron beam and tightly focused laser beam whereby the beams propagate normally to each other.
Two temporally separated ultrashort pulses are interfered spectrally to obtain two-dimensional phase distribution of plasma waves generated by a terawatt laser. This technique allows micron-scale resolution in space with 14-fs time resolution.
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