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The advantages of laser micro-processing in device manufacture for the solar, displays and microsystems industries have lead to the replacement of conventional manufacturing techniques in production environments. Tool advances and industrial production techniques will be discussed.
Laser micro-processing techniques are becoming commonplace in the industrial production of high-tech devices. As the limit of conventional manufacturing is reached, laser micro-processing presents itself as an enabling technology in a wide range of applications.
Pulsed laser sources are widely used for the micro-processing of materials from the structuring and patterning of surfaces to the direct machining of devices. This paper discusses laser micro-processing techniques for the fabrication of microstructures with high accuracy and precision over large areas. Techniques discussed include laser mask projection techniques, synchronised image scanning (SIS)...
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