The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
Carbon and fluorine co-implantation have shown encouraging junction formation improvement, especially for P-type junctions. Nevertheless, no obvious improvement is found for arsenic implants. In this paper, phosphorous with different co-implants shows that C co-implant can effectively suppress phosphorous diffusion. With C co-implant, the junction depth decreased 42% at low temperature RTP combined...
Non-melt laser annealing has been investigated intensively to form ultra-shallow junction. Particularly, effect of low temperature annealing prior to non-melt laser annealing was studied. It is found that the leakage current under reverse bias of p+/n diodes was decreased by about two orders of magnitude in low temperature pre-annealing / laser annealing sample as compared with that of laser annealing...
The redistribution during annealing of low-energy B implants in SOI structures and in bulk Si have been investigated by comparing Secondary Ion Mass Spectrometry (SIMS) and simulated profiles. Samples preamorphised with Ge at different implantation energies have been prepared in order to investigate the effects of the damage position on B diffusion. The specimens have been subsequently B implanted...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.