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This paper demonstrates a low cost MEMS variable optical attenuator (VOA) with high performance for the wavelength division multiplexed (WDM) applications. Two single-mode fibers (SMFs) are used as the input and output of VOA. A shutter is actuated into the optical path by an electrostatic comb-type actuator. The device is fabricated on a single silicon wafer by a novel simple bulk-silicon micromachining...
To enable MEMS designers to create fabrication-ready models of MEMS devices in an intuitive environment, this paper describes a MEMS design strategy that uses parameterized three-dimensional (3D) part features to construct geometric models of MEMS devices and then generates mask-layouts and process flows automatically. SolidWorks, an outstanding 3D design tool, is utilized to build the 3D model of...
This paper presents the effect of driving waveform for piezoelectric bend mode inkjet printhead with optimized mechanical design. Experimental and theoretical studies on the applied driving waveform versus jetting characteristics were performed. The inkjet head has been designed to maximize the droplet velocity, minimize voltage response of the actuator and optimize the firing frequency to eject ink...
Piezoelectric material plays an important role in the extensive applications of microelectromechanical systems (MEMS). However, its thick-film fabrication process is still not well-established along with the MEMS development. Here we develop a thick-film microfabrication process specifically for the lead-zirconate-titanate (PZT) piezoelectric material. The growth of thick PZT film is facilitated by...
This paper presents a novel channel fabrication technology of monolithic bulk-micromachined embedded channels. Based upon implementing two-step complementary dry etching technique and conformal parylene C layer deposition, high-aspect-ratio (internal channel height/internal channel width, greater than 20) polymer channels with uniform quasi-rectangular sidewalls have been successfully fabricated in...
Conventional direct conversion devices of radioisotope micro battery (RMB) suffer from small surface area and unreliability. In order to solve these problems, a method, which is verified with simulation results, is introduced for modeling the direct conversion devices. The fundamental structure of RMB is presented, and the equations of current are founded. The novel direct conversion device of vertical...
Functionalized quantum dots have been successfully attached to multi-walled carbon nanotubes over carbodiimide-assisted coupling. Characterization in a transmission electron microscope shows the quantum dots are attached mainly at the opened tips and defect sites on the side-walls of nanotubes, suggesting the covalent nature of the bonding and high selectivity to chemically reactive sites. Due to...
This paper present a novel electrostatic drop-on-demand micro jetting device featured by a MEMS fabricated nozzle with a conductive pole inside, referred to here as a pole type nozzle. The electric voltage signal applied to the ring shaped upper electrode plate, against the pole as the ground, allows a micro-dripping ejection of droplet to take place: That is, a tiny droplet is taken away from the...
In this paper, the CFD approach is used to simulate the thermal behavior in an electromagnetically driven microgyroscope. The driving wires, in which the alternating current flows, are treated as the heat sources. For a glass-silicon-glass device structure, it is found that the differences of the temperature, pressure and velocity along the driving direction surrounding the proof masses increase as...
Based on self-scrolling of Si/Cr bilayer films on Si(001) wafers, various micro- and nanostructures including micro-claws, microtubes, helical nanobelts, nanorings and nanospirals are fabricated in a controllable way. The scrolling principles of the structures from Si/Cr bilayer films are discussed. The flexibility of individual Si/Cr nanospirals and nanorings has been investigated using a nanorobotic...
We have demonstrated multi-walled carbon nanotube (MWCNTs) based sensors, which are capable of detecting alcohol vapor with ultra-low power. We fabricated the Si-substrate sensors using an AC electrophoretic technique so as to form bundled MWCNTs sensing elements between Au microelectrodes. The I-V measurement illustrates that we can activate the sensors at the Ohmic region of the sensors (at 10 muA),...
Microelectromechanical system (MEMS) is naturally continuing its downsizing into nanoelectromechanical system (NEMS), but at the same time it is indispensable in the package equipment used for nano-devices packaging in NEMS manufacture. A novel dual-grating macro-micro driven high speed precision XY-stage positioning system is presented in this paper. Combining macro with micro actuator, a system...
Silicon-based MEMS techniques are very popular for the manufacture of micro parts. Only a limited number of materials can be processed by these techniques. As the rapid development of Selective Laser Sintering(SLS) in laser rapid prototyping field almost any material can be used. Laser Micro Sintering(LMS) was recently introduced in the fabrication of 3D MEMS parts. The main difference between SLS...
In this paper, we present work on the design, fabrication, readout technique and vacuum packaging of z-axis gyroscopes. A vacuum package that houses the gyroscope and its control electronics has bee built and tested. The entire gyroscope package including control electronics is approximately phi42 times 24mm in dimensions. This vacuum packaged gyroscope has a scale factor of 19.8mV/deg/sec with a...
The design and testing of micro thermophotovoltaic (micro-TPV) system is described in this paper. The system is made of a SiC emitter, a dielectric filter and a GaSb photovoltaic cell array. The open-circuit voltage and short-circuit current can be measured by a multimeter, and the output power can be calculated. The effect of mass flux and the distance between the PV cell and outer wall of the combustor...
A large-inductance inductor using double-layer coils on HR (high-resistance) substrate is presented. The design is based on the analytical equation of mutual inductance and the current direction of the coils on different layers. The inductor is realized with a micro-machined process which is compatible with standard CMOS process. To evaluate the performance of double-layer coil inductor, a single-layer...
This paper advances a kind of micro spectrometer, which is based upon Fabry-Perot antrum's character of filtering the waves. The basic structure of the micro spectrometer is the array of Fabry-Perot antrum which contains many different length of antrum on the substrate of silicon, consequently we can achieve the detector for several wavelengths simultaneously. The unit of probing is a Fabry-Perot...
This paper presents the fabrication of a micro droplet ejector for the application of digital printing system. The ejector makes the ink droplets of approximately 80 squaremum diameter on demand. The ejecting system is the type of face-shooter. The method of actuating membrane is bending mode using d31 of PZT. The size of ejector is 27.6 mm x 27.75 mm x 1.1 mm, and the pitch between nozzles is 2.54...
The reduction in dimensions of biochip arrays is of interest only if the size of the spots containing DNA or proteins is kept uniform. This condition is necessary to properly compare fluorescence signals from the different spots and thus to validate the results. Toward this aim, we propose a fully automated MEMS-based spotter enabling the spatial positioning of the depositing cantilever array and...
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