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In this paper, we present a cost effective parallel-branch spiral inductor with enhanced quality factor and resonance frequency. This structure is designed to improve the quality factor, but different from other fully stacked spiral inductors. The parallel-branch effect is increased by overlapping the first metal below the second metal with same direction. Measurement result shows an increased quality...
The LC VCO having oscillation frequency of 5GHz and using the transformer-coupled LC tank in 0.13 mum CMOS technology is developed. The LC tank that employs the drain-gate transformer feedback configuration is composed of a 4-port transformer and varactor diodes. The transformer has the quality factor increased by 1+k where k is the coupling factor between each port and it is characterized to propose...
High quality factor inductors and highly matched low capacitance density horizontal parallel plate metal-insulator-metal capacitors were fabricated in 130nm RF-CMOS technology with minimal or zero processing step addition. The high quality factor inductors were made using a novel triple damascene integration technique. Peak quality factor of 26 was demonstrated for a 0.3nH inductor. The low capacitance...
For the first time, nMOS varactors fabricated in FinFET technology were characterized and modeled at microwave frequency. The RF analysis is carried out as a function of the fin width. It is shown that the fin width has nearly no impact on the tuning range of the device, but on the quality factor (Q). Best Q's are obtained for wide fin devices, mainly due to the reduction of the series resistances,...
This paper presents implementation and characterization of high quality factor (Q) silver (Ag) in-plane tunable capacitors on various substrates. A combination of low-loss substrate and the highest conductivity metal is used to achieve very high Q at RF frequencies. A high quality factor (Q>200 @1GHz) 0.7pF silver capacitor fabricated on a low-loss suspended Avatrel membrane achieved a tuning of...
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