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Scan/ATPG failures have been one of the main failures contributing to low yield issues and problems in microelectronics. In this paper, the beauty of the TetraMax diagnosis together with the Laker diagnosis software which serve as a complement was discussed, as they are one of the key diagnosis tools currently in the industry to analyze the scan/ATPG failures. The concept of the scan test, the files...
X-ray photoelectron spectroscopy/electron spectroscopy for chemical analysis (XPS/ESCA) is being widely used in failure analysis of semiconductor industries and wafer fabrication, as it is able to provide not only elemental information, but also chemical binding information. For example, using its fingerprint of C=O, we are able to identify possible root causes of carbon contamination in wafer fabrication...
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