2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) > 374 - 377
Source
Abstract
Identifiers
book e-ISBN : | 978-1-4799-3509-3 |
DOI | 10.1109/MEMSYS.2014.6765654 |
book e-ISBN : | 978-1-4799-3509-3 |
DOI | 10.1109/MEMSYS.2014.6765654 |