This paper reports on figure-of-merit (FoM) enhancement techniques for a new class of lithium niobate (LN)-based microelectromechanical systems laterally vibrating resonators (LVRs). A weighted electrode configuration is used to experimentally demonstrate a more than enhancement for the device electromechanical coupling , and an optimized reactive ion etch is used to attain straighter LN sidewalls and subsequently a improvement in quality factor . As a result, the resonators orientated 30 to in the -cut plane exhibited a of 21.7%, and a quality factor of 1300, effectively corresponding to an FoM of 280—the highest demonstrated to date for LVRs. These devices are expected to provide an unprecedented and unmatched platform for frequency-agile and adaptive RF filtering technology.