2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems > 701 - 704
Source
Abstract
Identifiers
book ISSN : | 1084-6999 |
book ISBN : | 978-1-4244-2977-6 |
book e-ISBN : | 978-1-4244-2978-3 |
DOI | 10.1109/MEMSYS.2009.4805479 |
book ISSN : | 1084-6999 |
book ISBN : | 978-1-4244-2977-6 |
book e-ISBN : | 978-1-4244-2978-3 |
DOI | 10.1109/MEMSYS.2009.4805479 |