Journal of Microelectromechanical Systems > 2008 > 17 > 4 > 832 - 836
Source
Abstract
Identifiers
journal ISSN : | 1057-7157 |
journal e-ISSN : | 1941-0158 |
DOI | 10.1109/JMEMS.2008.926144 |
Journal of Microelectromechanical Systems > 2008 > 17 > 4 > 832 - 836
journal ISSN : | 1057-7157 |
journal e-ISSN : | 1941-0158 |
DOI | 10.1109/JMEMS.2008.926144 |